本研究著重於開發一種電感式生物感測器應用於人類白蛋白（human serum albumin，HSA）偵測。研究內容分為兩個部分：(1) 平面式電感器，(2)電感式生物感測振盪器。研究初期設計平面式電感感測晶片，藉由微影製程技術實現，並透過網路分析儀分析感測晶片在不同環境下，其共振頻率之變化特性。以期能夠分辨在不同人類血清蛋白濃度下，隨著人類白蛋白濃度之增加，共振頻率亦隨之增加，可量測到人類血清白蛋白濃度範圍為0.1到1 mg/ml，而共振頻率與人類白蛋白濃度呈線性關係之結構為圈數在5.5時，線性關係更加明顯，其線性關係式為Y＝1.022 + 1.03X。 另外一方面，亦藉由TSMC 0.18 um 晶片下線之技術，設計電感式生物感測振盪器，希望能以積體電路之方式，將感測元件與振盪電路整合在相同晶片上。初期利用單純CMOS架構設計振盪電路，但其量測之靈敏性並不高，故後其利用TSMC 0.18 um CMOS MEMS 微機電製程將所感測區域之金屬面積裸露及基板掏空之方式，以其能夠將感測溶液(DI Water、HSA)滴在感測面積中，增加感測溶液對電感線圈之直接反應，並且能夠藉由輸出振盪頻率之差異性，分辨感測溶液之不同。 This research focused on developing an inductance type biosensor for human serum albumin (HSA) detection. The research content divides into two parts: (1) individual plane inductor and (2) integrated inductor in bio-sensing oscillator. First, by using microfabrication technology, the chips were fabricated and measured by the network analyzer to analyze the characteristics under different environments to observe the changes in self-resonant frequencies. The self-resonant frequency is changed by the difference of human serum albumin concentrations, and the frequency increases when the concentrations increase. The plane inductor with 5.5-turns presents the possible detection in the concentrations of HSA from 0.1 to 1 mg/ml. The relationship between the self-resonant frequency and the human albumin concentrations shows the linear relationship of Y = 1.022 + 1.03X. Secondly, by using TSMC CMOS process, the inductor is integrated into a bio-sensing oscillator. The bio-sensing chip is designed to be an oscillator circuit with the sensing area integrated into one chip by CMOS process. The inductive sensing area is exposed and the substrate underneath the inductor is removed by Micro-electromechanical System technique. With sensing solutions (DI Water, HSA)dropped in sensor region, the fabricated chip responses to the different oscillation frequencies for the different solutions.
