Local anodic oxidation kinetics of chemical vapor deposition graphene supported on a thin oxide buffered silicon template

NCU Institutional Repository > 理學院 > 物理學系 > 期刊論文 > Item 987654321/105148

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://ir.lib.ncu.edu.tw/handle/987654321/105148

题名:	Local anodic oxidation kinetics of chemical vapor deposition graphene supported on a thin oxide buffered silicon template
作者:	溫偉源;Chuang, Min-Chiang;Chien, Hsiao-Mei;Chain, Yuan-Hong;Chi, Gou-Chung;Lee, Sheng-Wei;Woon, Wei Yen
贡献者:	理學院物理學系
关键词:	Anodizing;atomic force microscopy;Buffers (chemistry);Chemical vapor deposition;copper;Cross-disciplinary physics: materials science;rheology;Exact sciences and technology;foil;Graphene;Materials science;Nanostructure;Other materials;Oxidation;Oxides;Physics;reaction kinetics;Silicon;Specific materials;spectroscopy;Strain;vapors
日期:	2013-04-01
上传时间:	2026-04-23 12:08:25 (UTC+8)
出版者:	Elsevier Ltd.;Kidlington: Elsevier Ltd
摘要:	摘要： Study of local anodic oxidation (LAO) of single layer graphene (SLG) supported on thin oxide buffered silicon template is reported. Centimeter scaled SLG sheet grown through chemical vapor deposition on Cu foil is transferred onto patterned silicon template covered with thin oxide steps. LAO are performed on the supported SLG through contact mode atomic force microscopy in ambient condition. LAO bumps with heights exceed physical carbon–oxygen stacking are formed on thin oxide buffered samples. Micro-Raman spectroscopy reveals the coexistence of surface graphene oxide formation and local strain near the LAO patterns. The writing speed dependence of LAO bump shows a multi-exponent behavior, indicating inhomogeneous chemical profiles involved in the LAO process. The observation points to a sequential kinetics of surface SLG oxidation prior to subsurface silicon oxide protrusion formation. Our work shows the necessity to consider oxidation of substrate through the subsurface buffer layer during nano-scaled field effect device fabrication with LAO method. The strain generation from the subsurface protrusion suggests possible tuning knob for local distortion of SLG structure. 出版者： Kidlington: Elsevier Ltd 出版日期： 2013-04-01 出處： Carbon, 2013-04, Vol.54, p.336-342 資源來源： ScienceDirect 版權： 2012 Elsevier Ltd 版權： 2014 INIST-CNRS 識別號： ISSN: 0008-6223 識別號： EISSN: 1873-3891 識別號： DOI: 10.1016/j.carbon.2012.11.045 識別號： CODEN: CRBNAH
显示于类别:	[物理學系] 期刊論文

文件中的档案:

档案	描述	大小	格式	浏览次数
index.html		0Kb	HTML	29	检视/开启

在NCUIR中所有的数据项都受到原著作权保护.

社群 sharing

数据加载中.....