本研究成功於N-type (001)之矽單晶基材上，利用鹼性蝕刻法及兩步驟金屬輔助化學蝕刻法分別製備出大面積之隨機排列金字塔結構及準直奈米線結構並以拋光之矽單晶基材作為對照組，利用DI Water初步測試其水衝擊結果並探討其產電原理。接著，為了改善矽晶材料長時間暴露於空氣中容易形成氧化層，導致材料表面從疏水轉變為親水的困境。本研究利用表面改質技術，於具備奈米結構之矽晶材料上噴塗商售之防水噴霧，進而提升材料之疏水性及長時間穩定性。經實驗結果可證實，材料表面維持長久之疏水性，且與未噴塗之結構相比，接觸角顯著提升。此外，該表面改質技術除了提升材料的疏水特性外，同時也提升了輸出電壓及輸出電流。 為進一步提升水衝擊元件之電性輸出，本研究首先從材料結構方面切入，同時結合了前述之鹼性蝕刻法與兩步驟金屬輔助化學蝕刻法，先製備出大面積之隨機排列金字塔結構並於其表面製備一維矽晶奈米線以形成矽單晶微奈米結構，此結構不僅具備高比表面積之特性，且結構強度優於準直型矽晶奈米線結構，同時也具備了優異的疏水性。將此結構以前述噴塗技術對其進行表面改質，其接觸角量測結果顯示出經表面改質後的矽單晶微奈米結構具備優異且長時間穩定之疏水特性，且於水衝擊發電量測中顯現出優於前述其他奈米結構之電性輸出。此外，為探究其最佳電性輸出，本研究也透過改變外部條件來探究發電趨勢之變化，如滴水高度、傾斜角度和滴水頻率等，透過實驗結果可評估其元件之最佳量測條件。 最後，為符合可撓曲穿戴式裝置及實際應用需求，本研究擬透過一步驟金屬輔助化學蝕刻技術實現均勻且超薄單晶矽基材的製備，並於正面製備前述最佳製程條件之矽單晶微奈米結構，並實施表面改質，期望該結構不僅展現出優異的耐彎折特性，且在彎曲狀態下仍具備穩定的發電性能。最終，本研究預期進行串、並聯水衝擊發電元件模組實驗，成功對多個電容充電並進行串聯後驅動商售之 LED 燈，證明此元件作為微型供電裝置之應用具備了發展潛力。;This study successfully fabricated micro-pyramid structures and vertically aligned nanowire arrays on n-type (001) silicon substrates via alkaline etching and two-step metal-assisted chemical etching (MACE) to systematically investigate water-impact energy harvesting mechanisms. To combat surface degradation from native oxide formation upon atmospheric exposure—which undesirably shifts the surface from hydrophobic to hydrophilic—a commercial hydrophobic coating was spray-deposited onto the textured surfaces. Experimental results confirmed that this surface modification technique not only achieved durable， long-lasting hydrophobicity with a significantly increased contact angle， but also effectively boosted the device′s electrical performance， yielding a simultaneous enhancement in both output voltage and current. To further maximize the electrical output， both etching techniques were integrated to engineer a hierarchical silicon single-crystalline micro-nano structure. Compared to conventional standalone nanowire arrays， this unique architecture offered an exceptionally high specific surface area， superior structural robustness to withstand fluid impact， and outstanding stable hydrophobicity， thereby exhibiting peak power generation performance. Furthermore， the device′s operational efficiency was systematically evaluated and optimized by exploring the shifting trends in electricity generation under varying external parameters， including the dripping height， inclination angle， and dripping frequency. Finally， targeting flexible wearable applications and real-world deployment， uniform and ultra-thin single-crystal silicon substrates were successfully developed via a one-step silver-assisted chemical etching approach. The optimized hierarchical structure engineered onto this flexible platform demonstrated excellent bending endurance and sustained stable power output even under mechanical deformation. Ultimately， module integration experiments involving series and parallel configurations were conducted; the integrated system successfully charged multiple capacitors and illuminated commercial LEDs， validating its immense developmental potential as a micro-scale power supply system.
