本研究建構自供電微距感測架構，透過馬達尾流達成風力供電。核心原件為自製之軸向微型發電機，經由針對磁體、線圈與整體機構進行最佳化設計，實測在於無負載 300 rpm下可輸出5.06 Vrms與110.5 mW；3500 rpm時最大功率達20.03 W。 感測端之CMOS-MEMS磁力計則針對傳統結構進行設計優化，增加應力補償外框與位移放大機構。經量測證實，此結構成功抵消製程產生之Z軸殘留應力翹曲。元件第一共振頻率落於 3800 Hz，透過驅動內部位移放大機構提升結構形變量，使磁場感測靈敏度由0.069 V/T大幅躍升至3.88 V/T。 最後進行風力自供電系統之實際驗證，將發電機輸出穩壓至1.8 V後成功驅動磁力計，證實本系統能透過風能穩定供電給磁力計進行微距變化檢測。;This study constructs a self-powered micro-displacement sensing architecture. The core component is a custom-made axial micro-generator. Through optimized design of the magnets， coils， and overall mechanism， actual measurements show that under no-load conditions at 300 rpm， it outputs 5.06 Vrms and 110.5 mW; at 3500 rpm， the maximum power reaches 20.03 W. The CMOS-MEMS magnetometer at the sensing end optimizes the traditional structure by adding a stress compensation frame and a displacement amplification mechanism. This structure successfully cancels out the Z-axis residual stress warpage generated during the manufacturing process. The first resonant frequency of the device falls at 3800 Hz. By driving the internal displacement amplification mechanism， the structural deformation is effectively increased， causing the magnetic field sensing sensitivity to increase from 0.069 V/T to 3.88 V/T. Finally， practical verification of the wind-driven self-powered system was conducted. After regulating the generator′s output to 1.8V， it successfully drove the magnetometer， verifying that this system can stably supply power to the magnetometer via wind energy for micro-displacement change detection.
