隨著淨零排放與能源轉型政策之推動，揮發性有機物（Volatile Organic Compounds， VOCs）防制系統之評估面向已由污染削減效能延伸至能源消耗、碳排放及操作成本。本研究以半導體實廠為案例，比較沸石轉輪分別結合電熱式蓄熱式氧化爐（Regenerative Thermal Oxidizer， RTO）與天然氣直燃式熱氧化爐（Thermal Oxidizer， TO）之 VOCs 防制效能、操作能源、碳排放及操作成本。 本研究採用 2024 年整年度實廠資料，VOCs 入口與出口濃度以每日監測值進行分析。因未取得入口端獨立流量與質量流率，年度入口量、去除量及質量去除效率係在假設入口與出口標準體積流量相同之前提下進行推估。RTO 主加熱器及兩套系統風機用電量採工程估算，TO 天然氣使用量則依流量計紀錄計算；操作能源碳排放範圍限於外購電力及天然氣燃燒所造成之操作階段排放。研究結果顯示，RTO 與 TO 推估年度 VOCs 去除量分別約為 109.3 與 109.6 t-VOC/yr，差異不大；每日濃度去除效率之平均值分別為 93.7% 與 97.5%，以 TO 較高。RTO 推估用電量約為 TO 的 1.6 倍，惟納入天然氣後，TO 之終端能源投入較高。依本研究採用之排放係數估算，RTO 與 TO 年度操作能源碳排放量分別約為 1，161.1 與 998.8 t-CO₂e/yr；在既定成本邊界下，TO 之年度操作成本及單位 VOCs 去除操作成本亦較低。綜合而言，兩套系統之 VOCs 去除量相近；TO 具有較高之濃度去除效率、較低之操作能源碳排放及操作成本，RTO 則具有較低之操作終端能源投入。本結果僅反映本案例、2024 年資料、工程估算參數及既定系統邊界，不宜直接外推為所有 RTO 與 TO 技術之一般性優劣。;With the implementation of net-zero emissions and energy transition policies， the evaluation of volatile organic compound (VOC) control systems has expanded beyond pollutant removal performance to include energy consumption， carbon emissions， and operating costs. This study used an actual semiconductor manufacturing facility as a case study to compare two integrated VOC control systems: a zeolite rotor coupled with an electrically heated regenerative thermal oxidizer (RTO) and a zeolite rotor coupled with a natural gas-fired thermal oxidizer (TO). The two systems were evaluated in terms of VOC removal performance， operating energy use， carbon emissions， and operating costs. Full-year operational data from 2024 were analyzed using daily monitoring data for VOC concentrations at the inlet and outlet. Because independent inlet flow rates and inlet VOC mass flow rates were unavailable， annual VOC inlet mass， VOC mass removed， and mass removal efficiency were estimated under the assumption of equal standard volumetric flow rates at the inlet and outlet. Electricity consumption by the RTO main heater and the fans of both systems was estimated using engineering calculations， whereas natural gas consumption by the TO was determined from flowmeter records. The carbon emission boundary was limited to operational emissions associated with purchased electricity and on-site natural gas combustion. The results showed that the estimated annual amounts of VOC removed by the RTO and TO systems were approximately 109.3 and 109.6 t-VOC/yr， respectively， indicating little difference between the two systems. The mean daily concentration removal efficiencies were 93.7% and 97.5%， respectively， with the TO achieving the higher efficiency. The estimated electricity consumption of the RTO was approximately 1.6 times that of the TO; however， when natural gas consumption was included， the TO had a higher total final energy input. Based on the emission factors adopted in this study， annual operational energy-related carbon emissions were estimated at approximately 1，161.1 t-CO₂e/yr for the RTO and 998.8 t-CO₂e/yr for the TO. Under the defined cost boundary， the TO also had lower annual operating costs and lower operating costs per unit of VOC removed. Overall， the two systems achieved similar annual VOC removal amounts. The TO had a higher concentration removal efficiency and lower operational energy-related carbon emissions and operating costs， whereas the RTO had a lower total final energy input. These findings are specific to the case conditions， 2024 operational data， engineering estimation parameters， and defined system boundaries and should not be generalized to all RTO and TO systems.
