隨著半導體產業快速發展，製程排放之揮發性有機化合物（Volatile Organic Compounds， VOCs）已成為重要空氣污染來源，其中異丙醇（IPA）為常見之目標污染物。傳統活性碳吸附雖具有良好去除效果，但仍存在壓降大、流體分布不均及再生能耗高等問題。因此，本研究結合數位光處理（Digital Light Processing， DLP）3D列印技術與電化學再生方法，建立結構化活性碳之製備、固定床吸附及循環再利用技術。
本研究利用DLP製備具有直通(NC)及曲折(CC)流道之3D列印活性碳，以固定床系統探討不同流道及活化條件對IPA吸附性能之影響，並建立Thomas、Yoon–Nelson及Adams–Bohart吸附模式。此外比較恆電位與恆電流再生方式，以及不同電解質種類(Na?SO?、NaOH及H?SO?)與濃度對電化學再生效率之影響，並透過循環伏安法(Cyclic Voltammetry ，CV)、線性掃描伏安法(Linear Sweep Voltammetry ，LSV)及電化學阻抗分析(Electrochemical Impedance Spectroscopy ，EIS)探討材料之電化學特性。研究結果顯示，CO?活化可有效提升活性碳孔隙結構與IPA吸附能力，其中曲折流道(CC)因改善質量傳遞而具有較佳固定床吸附效能。吸附模式分析顯示，Thomas及Yoon–Nelson模式可有效描述貫穿曲線行為。電化學再生結果顯示，恆電位模式具有較佳穩定性，而不同電解質皆存在最佳操作條件，透過CV與EIS分析結果顯示，吸附飽和後電荷轉移阻抗增加，再生後雖可部分降低阻抗，但仍未完全恢復至新鮮樣品，顯示電化學再生可有效恢復吸附性能，但材料界面特性仍存在部分不可逆變化。在這其中以Na?SO?於不同濃度下皆展現良好再生效果。於最佳條件下進行五次吸附─再生循環後，再生效率仍維持約90%以上，顯示材料具有良好循環穩定性。
根據研究結果，本研究成功建立3D列印結構化活性碳之製備、固定床吸附、電化學再生及循環使用流程，證實藉由流道設計及適當電化學再生條件，可有效提升吸附材料之循環利用效能，對半導體製程VOCs控制及結構化吸附材料之開發具有應用潛力。;With the rapid development of the semiconductor industry， volatile organic compounds (VOCs) emitted from manufacturing processes have become a major source of air pollution. Among them， isopropyl alcohol (IPA) is one of the most common target pollutants. Although conventional activated carbon adsorption exhibits excellent removal performance， it still suffers from several drawbacks， including high pressure drop， non-uniform flow distribution， and high energy consumption during regeneration. Therefore， this study integrates Digital Light Processing (DLP) 3D printing technology with electrochemical regeneration to establish the fabrication， fixed-bed adsorption， and cyclic reuse of structured activated carbon.
In this study， DLP 3D printing was employed to fabricate structured activated carbon with straight-channel (NC) and tortuous-channel (CC) flow configurations. A fixed-bed adsorption system was used to investigate the effects of flow-channel design and activation conditions on the adsorption performance of IPA. The adsorption behavior was further analyzed using the Thomas， Yoon–Nelson， and Adams–Bohart models. In addition， potentiostatic and galvanostatic electrochemical regeneration methods were compared， and the effects of different electrolytes (Na?SO?， NaOH， and H?SO?) and their concentrations on regeneration efficiency were evaluated. The electrochemical properties of the materials were characterized by cyclic voltammetry (CV)， linear sweep voltammetry (LSV)， and electrochemical impedance spectroscopy (EIS).
The results showed that CO? activation effectively enhanced the pore structure of activated carbon and significantly improved its IPA adsorption capacity. The tortuous-channel (CC) structure exhibited superior fixed-bed adsorption performance owing to enhanced mass transfer. Adsorption model analysis indicated that the Thomas and Yoon–Nelson models accurately described the breakthrough behavior of the adsorption process. Electrochemical regeneration results demonstrated that the potentiostatic mode provided better operational stability than the galvanostatic mode. All investigated electrolytes exhibited optimal operating conditions for regeneration， while Na?SO? achieved consistently high regeneration performance over a wide concentration range. CV and EIS analyses revealed that the charge-transfer resistance increased after adsorption saturation and decreased after electrochemical regeneration; however， it did not fully recover to the level of the fresh sample， indicating that although electrochemical regeneration effectively restored adsorption performance， some irreversible changes remained at the material interface. Under the optimal operating conditions， the regeneration efficiency remained above 90% after five consecutive adsorption–regeneration cycles， demonstrating excellent cyclic stability.
Based on these findings， this study successfully established an integrated process for the fabrication， fixed-bed adsorption， electrochemical regeneration， and cyclic reuse of DLP-fabricated structured activated carbon. The results confirm that appropriate flow-channel design combined with optimized electrochemical regeneration conditions can effectively enhance the reusability of adsorption materials， providing promising potential for VOC control in semiconductor manufacturing processes and the development of structured adsorbent materials.
