隨著半導體製程邁入ULSI (超大尺寸整合) 階段與產業隨競爭者的增加，並在幾乎所有製造廠皆擁有類似的製造技術與設備下，使得半導體產業成為高度標準化的產業。大量的生產以降低成本，造成供過於求的情況，也使得價格也嚴重下跌。因此想要在低價的情況下獲利，除了降低生產成本外，嚴格的製程控制已成為重要目標。 自動化生產程度越高，人為介入調整設備機台的方式則越不可行，半導體業在自動化的要求一直以來，無不想盡辦法提升。Run-To-Run (R2R) Control的製程控制技術降低了人員介入調整的工作，透過此控制技術，除了可作為品質控制外還有增進品質的功能。因此這個系統成為各半導體廠努力導入的一個系統。但由於半導體製程複雜、機台種類繁多；且依據摩爾定律可知，半導體的製程技術推陳出新的速度之快，常使此類系統尚未開發完成；製造程序就已改變，也使得此類系統尚未開發完成就遭受失敗的命運。 本論文的目標是設計一個，具有彈性且合乎經濟效益的先進製程控制系統架構 Run-To-Run (R2R) Control Platform。透過物件導向軟體工程的技術，來設計此一架構，並可使依循此架構所設計的R2R控制器系統，能快速開發且易於導入與實行。 本系統預期的效益是： (1) 建立一個Run-To-Run (R2R) Control Platform，使R2R控制器系統能快速開發且易於導入與實行。 (2)因應各種不同模組的製程，如沉積、薄膜、蝕刻或黃光等；不會因製程的不同，而使得控制器開發時有太大差異。 (3)依循相同的架構，一致性的發展各個 R2R 控制器，可使得將來的系統維護或新增功能更為容易。 When the semiconductor process migrates to the Ultra Large Scale Integration (ULSI) technology and most manufacturers are using similar manufacturing techniques and equipment, this industry has become highly standardized and cost driven with high productivity. All of these factors from time to time result in oversupply and seriously hurt the selling prices of the chips. If the chip manufactures want to be profitable from this under-priced situation, in addition to lower down the overall manufacturing cost, a strict process control to minimize or eliminate the out-of-spec products becomes another critical area. The so-called Run-to-Run (R2R) control in Advanced Process Control (APC) is a solution for this purpose. It has the function to monitor the health of the chosen process and is able to adjust the process parameters to further improve the process capability. The purpose of this research is to present a R2R system design that it has the advantages as shown below: 1. The system architecture is developed under the foundation of Object-Oriented Software Engineering Technology and the blueprint of Advanced Process Control Framework Initiative (APCFI). This architecture allows for further development and extension with ease. 2. The technology of Web Service used in this architecture can replace the Common Object Request Broker Architecture (CORBA) platform to facilitate the integration and interaction among heterogeneous systems and components from different platforms. It not only equips the function of CORBA for handling Distributed Objects but also helps on cost down. It is also user friendly. 3. More importantly, this universal architecture can support different unit processes and is highly modulized. It can be applied to many process tools or CIM system.
