中大機構典藏-NCU Institutional Repository-提供博碩士論文、考古題、期刊論文、研究計畫等下載:Item 987654321/2190
English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 80990/80990 (100%)
造訪人次 : 43144431      線上人數 : 863
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜尋範圍 查詢小技巧:
  • 您可在西文檢索詞彙前後加上"雙引號",以獲取較精準的檢索結果
  • 若欲以作者姓名搜尋,建議至進階搜尋限定作者欄位,可獲得較完整資料
  • 進階搜尋


    請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/2190


    題名: 光強調變雷射書寫機之研製;Laser direct writer with light intensity modulation
    作者: 杜茂楓;Mao-feng Du
    貢獻者: 機械工程研究所
    關鍵詞: 雷射書寫機;光強調變;灰階光罩製作;LDW glass
    日期: 2002-06-27
    上傳時間: 2009-09-21 11:40:27 (UTC+8)
    出版者: 國立中央大學圖書館
    摘要: 傳統的繞射光罩製作技術大多利用二階(binary)光罩製作出多階的繞射元件,藉由多重曝光顯微技術以提昇繞射元件的光學效率,然將會造成製程上的煩瑣及繞射元件的誤差,若能直接製作出多階(multi-level)或灰階(grey-level)光罩,將會改善這些誤差的困擾。 國內對於灰階光罩的製程及機台尚屬於起步的研究階段,因此在本論文主要為研發灰階光罩的製作機台,名為光強調變雷射書寫機,並且利用此機台作實際的灰階光罩書寫並加以檢測,同時也將此灰階光罩經由半導體製程所製作出的成品加以量測比較,進而得知此機台所製作出的光罩是否達到要求,並以此來改善機台之精確性與可靠性,進而製作出符合需求的灰階光罩。 Traditionally, the diffractive optical element (ODE) is made by using the multiple binary-level lithography processes to enhance the diffractive efficiency. Due to the multiple exposures, the manufactory error will be included and more complicate processes is need to be considered. Therefore, to overcome these problems, the grey level mask can be used, in which only one exposure is needed to fabricate the optical element. This project presents that a laser machine with light intensity modulation to fabricate grey level masks. In the writer system, a solid-state laser with the power of 180 mw is used as the working light source. The processed target is laser direct write glass developed by the Canyon Material company. An acoustic-optics modulator (AOM) is used to modulate the laser intensity. To make sure the result of the processed mask, a measurement system is built. The laser direct writer system is already out of the binary methods to manufacture optical mask. The optical elements designer can use the LDW system to design any appropriate mask. Thus, the LDW system is a quite useful system for the ODEs.
    顯示於類別:[機械工程研究所] 博碩士論文

    文件中的檔案:

    檔案 大小格式瀏覽次數


    在NCUIR中所有的資料項目都受到原著作權保護.

    社群 sharing

    ::: Copyright National Central University. | 國立中央大學圖書館版權所有 | 收藏本站 | 設為首頁 | 最佳瀏覽畫面: 1024*768 | 建站日期:8-24-2009 :::
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©  2006-2024  - 隱私權政策聲明