摘要 近年來微電化學加工的應用在電化學加工過程中扮演著非常重要的角色，若在微電化學加工系統中施以極短的脈衝電壓，藉著金屬與電解液界面上的電雙層電容器的充電行為，能夠將電化學反應侷限於電極間隙較小的區域，亦即電化學鑽孔加工中的鑽孔區。除了能提高加工精確度之外，對於加工效率的提升也有相當大的幫助。本文即利用電雙層電容器的充電行為，來模擬電化學加工後的電位分佈與工件外型，由此來觀察脈衝電壓對電化學加工的影響，發現到若減少脈衝期間或脈衝期間可以降低過切量的發生，進而提升加工的精確度。 ABSTRACT Electrochemical micromachining is becoming more and more important in the field of electrochemical machining in recent years. By applying ultra-short pulse voltage in electrochemical machining systems, electrical reactions can be confined to electrode regions in close proximity because of the double layer charging on the metal/electrolyte interface. Therefore, the precision can be increased as well as the efficiency of machining. This article simulated the double layer charging in electrochemical micromachining by using ultra-short pulse voltage, and the influence of pulse voltage would be also discussed.
