Abatement of perfluorocompounds by tandem packed-bed plasmas for semiconductor manufacturing processes

NCUIR > Engineering College > Graduate Institute of Environmental Engineering > journal & Dissertation > Item 987654321/30097

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Title:	Abatement of perfluorocompounds by tandem packed-bed plasmas for semiconductor manufacturing processes
Authors:	Lee,HM;Chang,MB;Lu,RF
Contributors:	環境工程研究所
Keywords:	QUENCHING RATE CONSTANTS;NONTHERMAL PLASMA;REACTOR;CF4;EMISSIONS;NITROGEN;REMOVAL;ENVIRONMENT;CONVERSION;PYROLYSIS
Date:	2005
Issue Date:	2010-07-06 16:11:11 (UTC+8)
Publisher:	中央大學
Abstract:	The technological feasibility and chemical kinetics of carbon tetrafluoride (CF4) decomposition with tandem packed-bed plasmas (TPBPs) are investigated in this study. Relevant parameters including types of packing dielectric materials, applied voltage, di
Relation:	INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH
Appears in Collections:	[Graduate Institute of Environmental Engineering ] journal & Dissertation

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