Evaluation of four kinds of nonthermal plasma reactor for abatement of perfluorocompounds

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Title:	Evaluation of four kinds of nonthermal plasma reactor for abatement of perfluorocompounds
Authors:	Lee,HM;Chang,MB;Chen,CW
Contributors:	環境工程研究所
Keywords:	BARRIER DISCHARGE REACTOR;EMISSIONS;DECOMPOSITION;C2F6;REMOVAL;GASES;CF4;PERFLUOROCARBONS;ENVIRONMENT;REDUCTION
Date:	2005
Issue Date:	2010-07-06 16:11:29 (UTC+8)
Publisher:	中央大學
Abstract:	Perfluorocompounds (PFCs) are widely used in the semiconductor manufacturing industry as etching gases and chamber cleaning gases. However, PFCs intensely absorb infrared radiation and aggravates global warming consequently. This study applies nonthermal
Relation:	JOURNAL OF ADVANCED OXIDATION TECHNOLOGIES
Appears in Collections:	[Graduate Institute of Environmental Engineering ] journal & Dissertation

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