Visualization of the effect of liquid dispensing method during spin coating

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題名:	Visualization of the effect of liquid dispensing method during spin coating
作者:	Huang,Kuo-Hsin;Chou,Fu-Chu;Yang,Cheng-Pin
貢獻者:	機械工程研究所
關鍵詞:	ROUGH ROTATING-DISK;FINGERING INSTABILITY;FLOW;FILM;REDUCTION;MODEL
日期:	2007
上傳時間:	2010-07-06 16:21:45 (UTC+8)
出版者:	中央大學
摘要:	In this study, we investigate how the method of liquid dispensing, including released drop, centered injection and spiral injection, affects the coating efficiency during spin coating processes. The flow visualization indicates that the method of liquid d
關聯:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
顯示於類別:	[機械工程研究所] 期刊論文

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