Study of precision micro-holes in borosilicate glass using micro EDM combined with micro ultrasonic vibration machining

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/31080

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/31080

Title:	Study of precision micro-holes in borosilicate glass using micro EDM combined with micro ultrasonic vibration machining
Authors:	Yan,BH;Wang,AC;Huang,CY;Huang,FY
Contributors:	機械工程研究所
Date:	2002
Issue Date:	2010-07-06 16:34:59 (UTC+8)
Publisher:	中央大學
Abstract:	Because of its excellent anodic bonding property and surface integrity, borosilicate glass is usually used as the substrate for micro-electro, mechanical systems (MEMS). For building the communication interface, micro-holes need to be drilled on this subs
Relation:	INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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