Design and fabrication of aspherical bimorph PZT optics

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Title:	Design and fabrication of aspherical bimorph PZT optics
Authors:	Tseng,TC;Chen,SJ;Yeh,ZC;Perng,SY;Wang,DJ;Kuan,CK;Chen,JR;Chen,CT
Contributors:	機械工程研究所
Date:	2001
Issue Date:	2010-07-06 16:35:50 (UTC+8)
Publisher:	中央大學
Abstract:	Bimorph piezoelectric optics with a third-order-polynomial surface is designed and a prototype is fabricated as active optics. Two pairs of silicon (Si) and lead zirconate titanate (PZT) piezoelectric ceramic are bonded as Si-PZT-PZT-Si together with a mu
Relation:	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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