Micro hole machining of borosilicate glass through electrochemical discharge machining (ECDM)

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/31117

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/31117

Title:	Micro hole machining of borosilicate glass through electrochemical discharge machining (ECDM)
Authors:	Yang,CT;Ho,SS;Yan,BH
Contributors:	機械工程研究所
Keywords:	MATERIAL REMOVAL;MODEL
Date:	2001
Issue Date:	2010-07-06 16:36:20 (UTC+8)
Publisher:	中央大學
Abstract:	The borosilicate glass serves as the substrates of the micro sensors owing to their excellent anodic bonding properties. To build up the electrical through channel and connect the internal system with the environment, micro holes should be drilled on the
Relation:	PRECISION MACHINING OF ADVANCED MATERIALS
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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