High speed interferometric ellipsometer

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35207

Title:	High speed interferometric ellipsometer
Authors:	Tsai,Chien-Chung;Wei,Hsiang-Chun;Huang,Sheng-Lung;Lin,Chu-En;Yu,Chih-Jen;Chou,Chien
Contributors:	光電科學與工程學系
Keywords:	OPTICAL HETERODYNE;PHASE
Date:	2008
Issue Date:	2010-07-07 14:06:33 (UTC+8)
Publisher:	中央大學
Abstract:	A novel high speed interferometric ellipsometer (HSIE) is proposed and demonstrated. It is based on a novel differential-phase decoder which is able to convert the phase modulation into amplitude modulation in a polarized heterodyne interferometer. Not on
Relation:	OPTICS EXPRESS
Appears in Collections:	[Department of Optics and Photonics] journal & Dissertation

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