本論文主要探討奈米碳管對於去氧核醣核酸生物感測器的研究，元件以電容器結構的作為量測重點，目的在於提升感應度與靈敏性。 實驗可分為三部分，首先我們將DNA以化學處理方式固定於氮化矽基板上並進行雜交實驗，來做為日後的控制實驗組；接著在氮化矽基板上成長奈米碳管，然後將DNA固定於上，一樣進行雜交實驗；最後再將基板材料更換為高介電常數材料五氧化二鉭，同樣地重複以上實驗。 在結果的量測與分析中，則是著重於此電容式生物感應器的電容電壓特性曲線上，因載子在空乏狀態時會受DNA自身帶負電的影響，而使圖形產生了曲線偏移現象，因此我們可用來確認DNA的固定化與雜交，另外利用公式後可進一步推算DNA固定化後密度。 This study focused on the carbon nanotubes biosensors for deoxyribonucleic acid. We measured the capacitor structure as key aim then improve the sensitivity and selectively. The experiment could be divided into three parts. First part, we tried the DNA immobilization and hybridization experiments on silicon nitride which was the control sample in the all experiments. Then we synthesized the carbon nanotubes on the bare silicon nitride and repeated the DNA immobilization and hybridization again. In the future, we plan that try to use the high dielectric materials instead of the silicon nitride and repeat both the DNA immobilization and hybridization again. In the experiment results and analysis, we focused on the capacitance-voltage curve of the capacitor-based biosensor. The curve will perform the voltage-shift due to DNA molecules are negatively charged. Therefore, we could check both the immobilization and hybridization then calculated the density of DNA after hybridization.
