電漿和網版印刷鍍膜材料表面改質; Surface Modification of Material by Plasma and Screen-Printing Coating

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Title:	電漿和網版印刷鍍膜材料表面改質;Surface Modification of Material by Plasma and Screen-Printing Coating
Authors:	蔡明瑞;Ming-jui Tsai
Contributors:	機械工程研究所
Keywords:	高功率脈衝磁控濺鍍;類鑽碳膜;網版印刷;連接板;過濾式陰極真空電弧;FCVA;HIPIMS;DLC;Screen printing;Interconnect
Date:	2010-07-20
Issue Date:	2010-12-08 13:43:48 (UTC+8)
Publisher:	國立中央大學
Abstract:	本研究使用電漿和網版印刷方法鍍膜進行材料表面改質。電漿鍍膜法採用過濾式陰極電弧法(FCVA)和高功率脈衝磁控濺鍍法(HIPIMS) 以鈦金屬為陰極、C2H2為反應氣體，在SKH51和WC基材表面被覆含鈦類鑽碳膜(Ti-C:H)，進行基材表面降低摩擦係數和磨耗性之表面改質。 FCVA製程以基材偏壓和靶電流的變化為實驗參數，而HIPIMS以基材偏壓和基材至靶距離為實驗參數。鍍膜之化學成份、外觀形貌、微結構、機械性質和磨耗性質等分別使用輝光放電分光儀、掃描式電子顯微鏡、拉曼光譜儀、X光繞射儀、 X光電子光譜儀、奈米壓痕儀、磨耗機和刮痕機等量測設備進行分析，量測結果顯示Ti-C:H膜表面光平，平均摩擦係數低於0.1、磨耗率為10-17 m3/Nm及附著力大於5 kg，鍍膜對基材表面摩擦潤滑性有明顯改善。另一個研究主題係使用網版印刷法被覆LSCF、LSM塗層在固態燃料電池之Crofer22 APU連接板上，在800 ℃之氧化氣氛處理200小時，結果顯示塗層能抑制Cr元素從Crofer22 APU連接板擴散出，塗層之ASR (area-specific resistance ；ASR)值以LSCF較LSM為低。 This study was to modify surface of material by Plasma and screen-printing coating. One of the study issue was that Ti-containing amorphous hydrogenated carbon (Ti-C:H) thin films were deposited on SKH51 and WC substrates by filtered cathodic vacuum arcing (FCVA) and high power pulse magnetron sputtering (HIPIMS) in order to reduce friction coefficient and wear rate. The Ti-C:H thin films deposition used the mixture of Ar and C2H2 gases atmosphere with the titanium metal as cathodic materials. Furthermore, the effects of substrate bias, target current and substrate-to-target distance on film properties have been studied from FCVA and HIPIMS coating system. The film properties including composition, morphology, microstructure, mechanical and tribological characterizations were investigated by glow discharge spectroscopy (GDS), scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), Nanoindenter and pin-on-disk tribometer, respectively. As a result, the surface of films was smooth, mean coefficient of friction was less than 0.1, wear rate was 10-17 m3/Nm, and critical load was more than 5 kg. Moreover, the screen-printing method also was investigated in the study. The LSCF and LSM films were applied on a Crofer22 APU interconnect for solid oxide fuel cells (SOFC) by screen-printing method. It was then tested in a simulated oxidizing environment, 800 ◦C for 200 h. The results showed that the LSCF film can change the oxidation behavior of Crofer22 APU. Moreover, long-term electrical resistance measurement also indicated that area-specific resistance (ASR) of the alloy with LSCF coating film is significantly lower than that of the LSM coating.
Appears in Collections:	[Graduate Institute of Mechanical Engineering] Electronic Thesis & Dissertation

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