隨著科技的進步與網路的發達，傳播的資訊量以倍數成長，如何提升資訊的傳遞速度已成為不可避免的課題，傳統同軸電纜與銅金屬導線受到材料特性限制已不敷使用，因此利用光做為高速傳遞媒介之光連結技術已成為先進歐美日各國爭相研究的課題。 本研究提出一個具45°反射面之非共平面轉折波導光路，此技術 可應用於晶片內或晶片與晶片間光學訊號傳遞。在架構上，採取主動元件與被動元件異側架構，藉由一個具光學品質的矽基45°反射面，利用波長為1550 nm 的紅外光源達到兩層間的高速訊號連結。此非共平面轉折波導光路包含45°微反射面與梯形脊狀波導，其梯形脊狀波導結構大小為40 μm。 本研究完成梯形脊狀波導以及非共平面轉折波導光路之光學模 擬、製程與光學特性量測，並發展一套針對脊狀波導端面之拋光研磨技術。經由設計的非共平面轉折波導光路，在梯形脊狀波導部分，插入損耗為-4.32 dB，拋光過後可提升插入損耗約49 %，傳播損耗為-0.404 dB/cm，出射端多模光纖空間位移容忍度在耦合能量損失1 dB時約為35 μm；非共平面轉折波導光路部份，插入損耗為-4.51 dB，拋光後可提升插入損耗約25 %，入射端單模光纖光源位移容忍度在耦合能量損失1 dB 時約為23 μm，接收端多模光纖位移容忍度則為42 μm，相鄰通道的串音雜訊準位約為-50 dB。 In recent years, the optical interconnect is an important issue for communication technology. How to improve the speed of information transfer has become an inevitable topic. Because of the limited by material properties, traditional of the coaxial cable and copper wire systems are inadequate. High-speed transmission using light as a medium of the optical interconnector has become the subject of competing research. In this paper, a non-coplanar bending waveguide with 45 degree reflector is proposed on SOI-based. This technique can be applied to the optical interconnector of inter- or intra-chip. In the framework, the active electrical components and passive photonic components are opposite side. The 45 degree micro-reflector with a smooth slant quality, and high-speed signaling link between active electrical components layer and passive photonic components layer are achieved by using infrared wavelength of 1550 nm light source. Non-coplanar bending waveguide include a Si-based 45 degree micro-reflector and a trapezoidal ridge waveguide which height is about 40 μm. In this work, the optical simulation, fabrication and measurement of non-coplanar bending waveguide with 45 degree reflector and trapezoidal ridge waveguide were achieved. The polishing techniques for end facet of trapezoidal ridge waveguide were also developed. After polishing the waveguide, the insertion loss can be enhanced 49% than unpolished waveguide. The insertion loss of trapezoidal ridge waveguide was -4.32 dB, and its propagation loss was -0.404 dB/cm. At output multi-mode fiber, the 1-dB degradation tolerance was about 35 μm. In the non-coplanar bending waveguide with 45 degree reflector, the insertion loss can be enhanced 25% after polishing the waveguide facet. The insertion loss of non-coplanar bending waveguide was -4.51dB, and the 1-dB degradation tolerance of input single-mode fiber was about 23 μm. At output multi-mode fiber, the 1-dB degradation tolerance is about 42 μm, and the cross-talk of nearby waveguide was about -50 dB.
