本論文中,我們以蒙地卡羅光線追跡法為基礎,建立了LED光萃取效率之光學模型,利用此模型分析GaN LED在不同微透鏡陣列結構下,光萃取效率的變化,探討當透鏡深寬比與表面填充率改變時,其對於晶片之光萃取效率影響;最後,在眾多光萃取機制中,尋找出光萃取效率之最佳值以及最佳結構參數。 In this thesis, we study light extraction efficiency of LEDs based on the simulation with Monte Carlo ray tracing. We analyze the light extraction efficiency for GaN LEDs with implanting different micro lens arrays with different aspect ratios and fill factors. Finally, we present the optimum structure parameters for the enhancement light extraction efficiency of GaN-based LEDs.