本論文利用原子力顯微鏡氧化，示範一種描繪二維光子晶體微共振腔之共振模態的方法。我們使用AFM 在L3 共振腔表面氧化，發現氧化會使共振模態藍移，同時仍可保持高品質因子，而且共振波長變化量與氧化位置的電場強度成正比，所以此方法可用以描繪共振模態。接著我們以氧化線條進行X 方向氧化掃描，可解析出2 個共振模態。最後則以氧化點進行XY 氧化掃描使解析能力增加，可解析出3 個共振模態及其精細結構。在這個實驗中空間解析度優於230nm。 In this paper, we demonstrate a method to map the resonance mode pattern of 2-dimensional photonic crystal micro-cavity by AFM oxidation.First, we oxide the surface of L3 cavity, found that the resonance modes blue shift after oxidation while high quality factor is preserved,and the mode shift is proportional to the electric field intensity at the oxide position, so the mode pattern can be mapped by AFM oxidation . Then we do X-direction scan with oxide line to resolve 2 resonance modes.Finally we do XY- direction scan with oxide point to improve spatial resolution, we resolve 3 modes and also found the fine structure. In this experiment, the spatial resolution is better than 230 nm.
