雙波長影像式橢圓儀之建立; Development of Dual-wavelength Imaging Ellipsometer

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题名:	雙波長影像式橢圓儀之建立;Development of Dual-wavelength Imaging Ellipsometer
作者:	曾耀騰;Yao-teng Tseng
贡献者:	光電科學研究所
关键词:	影像式橢圓儀;扭轉向列型液晶;單式光學系統;unitary optical system;TN-LC;imaging ellipsometer
日期:	2011-07-26
上传时间:	2012-01-05 14:35:40 (UTC+8)
摘要:	本論文利用光學橢圓儀的量測系統，利用兩種不同的波長光源與基本的P-S-A 架構來量測扭轉向列型液晶TN-LC的二維光學與物理製程參數的影像，藉由液晶樣品單式光學系統的特性結合橢圓雙折射等效性定理，透過穆勒矩陣與瓊斯矩陣的數學運算方法，計算出液晶的橢圓雙折射參數與等效線性雙折射與圓雙折射的光學參數。根據所量測到的光學二維參數再進一步計算出TN-LC的物理製程參數，包含非扭轉相位延遲、液晶導軸扭轉角的二維影像數據。利用最小二乘方的數學優化方法找出液晶樣品的分子預傾角與液晶單元間隙。利用本實驗理論與方法求得的TN-LC 二維影像與樣品的實際理論值獲得非常好的一致性。 In this thesis, we proposed that the two-dimensional measurement of the cell parameters of a twisted nematic liquid crystal (TN-LC) can be achieved by using a polarizer-sample-analyzer ellipsometric configuration with two-wavelength illuminations. We measure the elliptical birefringence of a TN-LC by equivalently decomposing it as the combination of a linear phase retarder and a polarization rotator based on the equivalence theorem of a unitary optical system. Therefore, the analytical expression between the characteristic parameters and cell parameters are derived using the Jones and Mueller calculus. Furthermore, we numerically find out the pretilt angle and cell gap of a TN-LC by least-squares fitting method. We experimentally demonstrate that our proposed method provides high measurement accuracy since our measured results close to given values.
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