Preparation and Photo- and Thermal-Curing Properties of Copolymers Applied in Negative-Type Photoresists

NCU Institutional Repository > 工學院 > 化學工程與材料工程學系 > 期刊論文 > Item 987654321/49963

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/49963

题名:	Preparation and Photo- and Thermal-Curing Properties of Copolymers Applied in Negative-Type Photoresists
作者:	Huang,HY;Chen,H
贡献者:	化學工程與材料工程學系
关键词:	METHACRYLATE;RESIST
日期:	2011
上传时间:	2012-03-27 16:27:32 (UTC+8)
出版者:	國立中央大學
摘要:	A series of monomers was polymerized and used as polymer binders in negative-type photoresists. The thermal properties of the polymer binders and the mechanical properties of their patterns were then studied. We used two four-component polymer binders: one consisting of methacrylic acid, styrene, benzyl methacrylate, and glycidal methacrylate, and another consisting of methacrylic acid, styrene, isobornyl methacrylate, and phenylmaleimide. Diallyl monoglycidyl isocyanurate (DA-MGIC) or monoallyl diglycidyl isocyanurate (MA-DGIC) was then reacted with the formed polymer binder to create a novel polymer binder with photo- and thermal-curing properties. The results showed that the thermal decomposition temperature (T-d) of the polymer binders increased when the DA-MGIC or MA-DGIC monomer was used in the binder; this was presumably due to the photo-curing, thermal-curing, and inter-penetration network characteristics of the polymer binders. Elastic recovery and compression of the patterns of the photoresist were measured using a nanoindenter. The results showed that the patterns exhibited excellent mechanical properties. The patterns were observed with a scanning electron microscope. The taper angle of the patterns became vertical due to the increased intensity of the inter-penetration network, which was revealed by the excellent inhibition of the pattern.
關聯:	MOLECULAR CRYSTALS AND LIQUID CRYSTALS
显示于类别:	[化學工程與材料工程學系 ] 期刊論文

文件中的档案:

档案	描述	大小	格式	浏览次数
index.html		0Kb	HTML	423	检视/开启

在NCUIR中所有的数据项都受到原著作权保护.

社群 sharing

数据加载中.....