Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer

NCUIR > Engineering College > Departmant of Mechanical Engineering > journal & Dissertation > Item 987654321/50207

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/50207

Title:	Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer
Authors:	Pan,MC;Bui,TA;Nien,YC;Shih,WC
Contributors:	機械工程學系
Keywords:	BULK ACOUSTIC RESONATORS;PIEZOELECTRIC FILMS;DROPLET FORMATION;ZINC-OXIDE
Date:	2011
Issue Date:	2012-03-27 17:06:28 (UTC+8)
Publisher:	國立中央大學
Abstract:	A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/SiO(2)/Si substrates under reasonable conditions, such as RF power of 178 W, substrate temperature of 380 degrees C, deposition pressure of 10 mTorr, and Ar:O(2) gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films. (c) 2011 The Japan Society of Applied Physics
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS
Appears in Collections:	[Departmant of Mechanical Engineering ] journal & Dissertation

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