| 摘要: | 本文係以過濾式陰極電弧法(FCVA)和高功率脈衝磁控濺鍍法(HPPMS)進行材料表面改質之研究，於電漿鍍膜製程中，以鈦金屬為陰極、C2H2為反應氣體，分別於碳化鎢(WC)、SKH51工具鋼和SUS304不銹鋼等基材表面披覆含鈦類鑽碳膜(Ti-C:H)，進行基材表面降低摩擦係數和磨耗性之表面改質並驗證FCVA製程鍍膜品質及將HPPMS製程導入耐磨耗DLC膜應用的效果。 FCVA製程以「基材偏壓」和「靶電流」的變化為實驗參數，而HPPMS製程以「基材偏壓」和「基材至靶距離」為實驗參數，透過輝光放電分光儀、掃描式電子顯微鏡、拉曼光譜儀、X光電子光譜儀、X光繞射儀及奈米壓痕試驗機、磨耗試驗機和刮痕測試機等工具，對鍍膜之組織結構及硬度、楊氏係數、摩擦係數、磨耗率、附著性等機械性質進行分析量測；以FCVA製程所得之Ti-C:H膜表面光滑，其硬度最高達18.3GPa、楊氏係數最高達180GPa、摩擦係數低於0.1、磨耗率在1.28 10-16m3/Nm以下及附著力大於4.9kg，而以HPPMS製程所得之Ti-C:H膜，其硬度最高達22.6GPa、楊氏係數最高達215GPa、摩擦係數低於0.165及附著力大於5kg;研究之結果顯示，FCVA可大幅提升鍍膜品質，可完全改善陰極真空電弧法的缺失，而以本研究FCVA及HPPMS電漿鍍膜製程於碳化鎢(WC)及SKH51工具鋼基材所披覆之Ti-C:H膜，其與基材間的附著力均優於一般使用標準，對降低摩擦係數和增加磨耗性的表面改質頗具成效。The study is to modify the material surface via Filtered Cathodic Vacuum Arcing (FAVA) and High Power Pulse Magnetron Sputtering (HPPMS). During manufacturing process of plasma coating, titaneum (Ti) is used as the negative pole while acetylene (C2H2) is used as the reaction gas. The Ti-C:H coating applies respectively on the surface of the substrate of WC & SKH51 tool steel and SUS304 stainless steel can modify the surface by reducing friction coefficient and its wearability, so as to verify the effect coating quality of FCVA, and effect of applying wearable DLC film to the manufacturing process of HPPMS. During FCVA manufacturing process, the experimental parameters based on the variation of substrate bias and target current ,while HPPMS parameters based on substrate bias and substrate-to-target distance. The application of instruments and tools, i.e. glow discharge spectroscopy (GDS), scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), Nanoindenter, pin-on-disk tribometer and scratch tester to perform the mechanical property analytical measurements; i.e. organized structure & hardness, Young’s modulus, friction coefficient, wear rate, and adhesion ability of coating. Via FCVA manufacturing process, the surface of Ti-C:H is smooth, its maximum hardness is 18.3GPa, maximum Young’s modulus is 180GPa, friction coefficient is less than 0.1,wear rate is under 1.28 10-16m3/Nm, and adhesive force is greater than 4.9 Kg. Via HPPMS manufacturing process the result of the surface of Ti-C:H, it maximum hardness is as high as 22.6GPa, the maximum Young’s modulus is 215GPa, friction coefficient is less than 0.165, and adhesive force is greater than 5 Kg. The result of the study shows that FCVA can highly enhance the quality of coating, completely improve the flaw of Cathodic Vacuum Arcing method. By studying FCVA and HPPMS manufacturing process of plasma coating, the adhesive force between the coating layer and substrate is better than general application level, and it contributes a better result to the reduction of friction force and the growth of wearability. |
