在本論文中，建立影像式外差干涉儀，對二維相位分佈進行量測，透過擴束器將雙頻雷射光束擴展成直徑1.5公分之平行光後入射待測樣品，再透過電荷耦合元件(CCD)連續取得光強度訊號。雙頻雷射光源經由單頻雷射光與電光調制器組合產生。在CCD取得第一張影像時，取得的時間與電光調制器驅動訊號的時間沒有關聯性，此隨機的時間誤差會因此產生未知相位項影響到真實相位的量測。此問題可透過對電光調制器提供兩個不同頻率的鋸齒波做為電光調制器的驅動電壓訊號。在數據分析過程中，透過矩陣法和希爾伯特轉換計算待測樣品相位分佈，游測量結果得知希爾伯特轉換法可得到較低的誤差以及較佳的均勻度。In this thesis, a heterodyne imaging interferometry for measuring the two-dimensional phase retardation distribution of a tested specimen is developed. A dual frequency laser beam with a 1.5 cm beam diameter is incident into a tested specimen and a charage couple device (CCD) camera is continuously acquired the intensity signal. Where the dual-frequency laser is achieved by using a single frequency laser in conjuctions of an electric-optic modulator. The first imaging which is acquired at an arbitrary time, this random access results an initial phase in the measurement so that the phase signal induced by a specimen cannot be measured exactly. This problem can be overcome by alternatively generating the sawtooth waves with two different frequency as a driving signal of an electric-optic modulator. During the data analysis procedure, a matrix method and Hilbert transform are utilized to calculate the phase distribution. The measured results show that Hilbert transform reveal the high measurement accuracy than the matrix method.
