研究期間：10208~10307;The Two-Photon Polymerization (TPP) micro-fabrication technique draws everyone’s attention gradually because of its fabrication capability of arbitrary-shaped and complex three-dimensional (3D) micro/nano-structures. Up to present, most of researches are used the layer-by-layer method, as known as two-and-half-dimensional (2½D) method which is a common manner in additive manufacturing technology, along one specific direction to produce 3D microstructures. However, the TPP micro-fabrication technique can produce microstructures in pure 3D way. This unique characteristic should be taken into account to develop a novel manner for increasing the manufacturing efficiency and yield. This project is a 2-year project, and the purpose is developing a 3D micro-manufacturing method for fabricating millimeter-size structures with ultra-precision (about 0.5~1.0μm) based on TPP micro-fabrication and 5-axis machining techniques. The innovation of this project is using a 5-axis motion stage instead of 3-axis stage in general. In addition to fully utilizing the 3D characteristic of TPP micro-fabrication, the 3D microstructure fabricated by proposed process has better structure strength and ultra-high dimensional accuracy, and suit for a variety of applications. This year will be the 1st year, and the research has two focal points. One is designing and setting a 5-axis micro-fabrication system, and the other is developing a patch scanning method to produce the laser scanning trajectories for 5-axis micro-manufacturing. At the 2nd year, the research will continuously focus on improving the micro-fabrication system and developing the contour tangent-form method. In this method, the laser focus is moved along the vertical contour of a microstructure by 5-axis motion stage and is polymerized at the perpendicular direction of the tangent. This can avoid the dimensional deformation which is usually happened by applied the vertical form method in general..
