雙光子聚合(Two-photon Polymerization, TPP)微製造技術由於可製作任意微/奈米尺寸級之複雜立體外型結構，運用領域廣泛，因而成為熱門之研究。在目前相關研究中，提高TPP製程效率與良率、與目標物品精度，一直是各方專家相繼努力之方向。本論文利用高斯光束推導出不同能量之能量均勻橢圓體、統計學上目標函式，計算出最適合雷射曝光位置，使得欲加工之微結構體素重疊能量均一以達到雷射曝光最佳化，提高微結構之尺寸精度，並且降低聚合時發生微爆炸之機率。最後本文提出幾個微結構範例顯示此方法改良之最佳化。;Due to Two-Photon Polymerization(TPP) micro-fabrication technology, it can be made in any three-dimensional complex shape and structure of micro/nano scale ,which is used in a wide range of fields , TPP micro-fabrication has become a popular issue. In the present studies , improving fabrication efficiency , micro-structure quality and enhancing object profile accuracy , all of these mentioned above has been already strive to do in every area of expert . This paper use Gauss Beam derivate many different uniform energy ellipsoid and built object function of statistics to calculate suitable laser exposure position . Not only micro structure voxel overlap ratio can become more uniform, which makes profile more accurate, but lower down the probability of micro-explosion when the structure in polymerization . At last , this paper will demonstrate some micro structure example before optimizing and after optimizing to prove this optimization feasibility.
