摘要 DWDM薄膜濾光片已廣泛地應用在光纖通訊系統中，為提高光纖通訊傳輸的要求與系統穩定性，對於光纖通訊系統中的元件可靠度特性量測與良率的提升是必要的。因此本論文研究的主題是利用可調式雷射與光功率計建立一個應用於光纖通訊系統中帶通濾光片的光譜量測系統，並對此系統做了相關的系統要求與誤差分析，系統的波長解析度至少要是帶通濾光片半波寬的十分之一以下。同時，運用此系統來量測薄膜帶通濾光片光譜特性，並量測以離子濺鍍製鍍在兩種不同基板熱膨脹係數(83´10-7/oC與133´10-7/oC)的單腔帶通濾光片穿透率光譜受溫度變化而造成光譜漂移的結果。最後，利用量測結果可預估出在相同制度條件下製鍍在基板熱膨脹係數為133´10-7/oC的帶通濾光片可得到為零的溫漂量，同時可求出影響光譜波位受溫度變化而漂移的各項影響因素(膜堆熱膨脹係數、泊松係數、折射率溫度係數等)數值。 Abstract DWDM thin film filters have been widely used in fiber-communication system. In order to have a stable communication, it’s necessary to do reliability measurement and improve the quality. The main subject in this study is to construct a spectral measurement system of band-pass filters in fiber-communication system. After system constructed and system error analysis, we conclude that the wavelength resolution width must be smaller than one-tenth of the FWHM of the bandpass filters. We have measured the TSCW (Temperature Shift of Central Wavelength) of the DWDM thin film filters deposited on two kinds of substrate with different thermal expansion coefficients (83´10-7/oC and 133´10-7/oC), and get the following the results: (1) Water absorption effect which is deposited by IAD (Ion Assisted Deposition ) or IBSD (Ion Beam Sputtering Deposition ) technology is no longer the main effect for TSCW of the DWDM thin film filters. (2) We can predict that the zero TSCW of the DWDM thin film filter deposited on the substrate with thermal expansion coefficient is 133´10-7/oC under such IBSD parameters (Main: BV=1100V (current density»260mA/cm2), IAD:BV=400V (current density»40mA/cm2)). (3) We can get the value of some thermal coefficients of the bandpass filter, such as thermal expansion coefficient, Possion’s ratio, refractive-index of temperature coefficient of the bandpass filter.
