本論文主旨為設計並製造出能用於MOCVD腔體的旋轉主軸，並透過實驗驗證其相關之設計性能。在MOCVD的製程環境中，高速、高溫與真空環境在設計上是主要的難關，且在此種嚴苛環境下還須確保主軸的運轉穩定度。因此在設計方向上分為支撐軸承設計、密封設計與冷卻系統設計三大部分。 在支撐軸承設計採用固定-浮動配置。其中固定端為背對背配置的角接觸滾珠軸承，目的為增長跨距，使旋轉軸的剛性增加，而浮動端則是深溝滾珠軸承，用來支撐旋轉軸下端的徑向負載。此外為提高主軸穩定度，降低其在轉動時的偏擺量與振動，會在軸承上施加預壓。 在密封設計方面，運動用真空密封元件採用磁流體軸封，固定件之間則使用O-ring來確保其真空度。為求旋轉軸的穩定，磁流體軸封配置於軸承的固定端與浮動端之間。 冷卻系統則分有兩個系統，分別為主軸外部冷卻流道與主軸中心冷卻流道。其中主軸外部冷卻流道是用於冷卻軸承與磁流體軸封。考慮其冷卻效果有限，因此搭配主軸中心冷卻流道直接冷卻旋轉軸，以確保主軸內的零件不會直接承受高溫而失效。冷卻系統設計完成後會先利用有限元素分析軟體確認其冷卻效能。 為確保設計之主軸能滿足MOCVD腔體的要求，本論文設計了性能驗證測試，包括主軸溫度、載盤偏擺與主軸振動等量測實驗。在主軸溫度量測實驗中，分別量測磁流體軸封外部冷卻、主軸外部冷卻與主軸中心冷卻三種冷卻條件下主軸各部位的溫度，以確認三種流道的冷卻效果。載盤偏擺量測則是量取載盤的軸向偏擺，以確認其偏擺不會影響製程結果。主軸振動量測則是為了確認主軸運轉時不會產生的過大的振動。 主軸溫度量測結果顯示主軸中心冷卻效果優於主軸外部冷卻。比較溫度量測實驗與有限元素分析之結果，兩者接近，可驗證本研究所建立之熱傳模型之可信度。另一方面，載盤軸向偏擺最大值為0.113 mm，小於設計目標0.15 mm。主軸振動量測到最大加速度為0.136g，確認此數值不會對機台造成明顯的影響。 綜合上述實驗結果，確認本論文所設計製作之主軸能用於MOCVD腔體中。 ;The aim of the paper is to design and manufacture a spindle to apply in a chamber for MOCVD process and validate its performances experimentally. The spindle must be designed as stable and robust to fulfill the extreme requirements, such as high speed, high temperature and vacuum. The main topics of design include therefore the bearing supporting, the sealing and the cooling system. The bearing supporting in the study is selected as locating-floating arrangement. The located bearing is a set of angular contact ball bearings in back-to-back arrangement to increase the supporting span for enhancement of the shaft stiffness. A deep groove ball bearing is used for the floating bearing in order to share the radial load. In addition, a preload is applied to the bearings in order to increase the stability and the stiffness of the spindle and to reduce the run-out and vibration of the susceptor. A magnetic rotary feedthrough is used for vacuum sealing, which is located between the located bearings and the floating bear considering the stability of the spindle. Two kinds of cooling systems are applied in the spindle: housing cooling system and shaft cooling system. The housing cooling system is used to cool down the located bearings and the feedthrough. With consideration that the cooling efficiency of housing cooling is not enough, the shaft cooling system is added. In order to validate the design, a FEM analysis is conducted for both cooling system. The analysis results are also compared with the results from an experiment. In order to ensure the spindle applicable for MOCVD chamber, three function validation tests are initiated: temperature measurement of the spindle, run-out measurement of the susceptor and vibration measurement of the spindle. Three cooling conditions are considered in the temperature measurement: magnetic rotary feedthrough cooling, housing cooling and shaft cooling. The axial run-out of susceptor is measured to confirm this error will not affect MOCVD process. The vibration condition of the spindle is also measured by using pose of accelerometers to confirming the stability during operation. From the results of measured temperature, the cooling efficiency of shaft cooling is better than that of housing cooling. Comparing with the results from the experimental measurement, the results from the heat transfer FEA are in good agreement with the measured results. The max value of axial run-out is 0.113 mm and less than the required value of 0.15 mm. The max. measured acceleration of vibration is 0.136 g. And no significant impact on the spindle is expected. Based on the results, the spindle developed in this paper is applicable for MOCVD chamber.
