以奈米壓印改善陽極氧化鋁週期性;Fabrication of Periodic AAO Films Pre-Patterned by Nanoimprint Technology

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/6972

Title:	以奈米壓印改善陽極氧化鋁週期性;Fabrication of Periodic AAO Films Pre-Patterned by Nanoimprint Technology
Authors:	黃柏諭;Bo-yu Huang
Contributors:	光電科學研究所
Keywords:	奈米壓印;陽極氧化鋁;nanoimprint;Anodic Aluminum Oxide;AAO
Date:	2007-09-12
Issue Date:	2009-09-22 10:33:37 (UTC+8)
Publisher:	國立中央大學圖書館
Abstract:	本篇論文利用奈米壓印系統和多次陽極處理改善磷酸型之陽極氧化鋁(Anodic Aluminum Oxide；AAO )孔洞的週期性。首先我們分別嘗試重量百分濃度1wt%與5wt%以不同電壓(90V~180V)進行陽極處理，找出適合奈米壓印母模週期的參數後，將鋁片預先以適當溫壓進行壓印，之後再進行陽極處理，陽極處理次數為五次，透過多次陽極處理以及奈米預壓印可得到較整齊的大孔洞陽極氧化鋁膜，其光子能隙可落在可見光波段。A nanoimprint system and multi-step anodization were applied to improve the arrangement of phosphoric acid type of anodic aluminum oxide (AAO). The proper anodizing parameter to match the period of the stamp mold was found out experimentally. After that, the AAO film was carried out by 5-step anodization. The pore configuration was well arranged and could have photonic band gap in visible range.
Appears in Collections:	[Graduate Institute of Optics and Photonics] Electronic Thesis & Dissertation

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