低維度新穎奈米結構設計、製備及其特性研究;Design and Fabrication of Low-Dimensional Novel Nanostructures and Their Properties

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Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/69865

Title:	低維度新穎奈米結構設計、製備及其特性研究;Design and Fabrication of Low-Dimensional Novel Nanostructures and Their Properties
Authors:	鄭紹良
Contributors:	化學工程與材料工程學系
Keywords:	奈米模板;矽化物;奈米結構;場發射;氣體偵測;Nanotemplate;Silicide;Nanostructure;Field emission;Gas sensing;材料科技
Date:	2016-03-29
Issue Date:	2016-03-29 17:54:27 (UTC+8)
Publisher:	科技部
Abstract:	隨著元件尺寸縮小至奈米尺度時，能整合於矽晶半導體奈米元件上之0 維及1 維奈米結構材料的先進製程技術近年來受到廣泛的注意。此主要是由於大面積規則有序排列的奈米結構陣列已被發現在先進奈米光電元件、觸媒，場發射元件及氣體感測器等領域上有很大的應用潛力。但要如何精準控制所製備各式奈米材料之尺寸、形貌、生成位置、結晶方向等，卻仍是目前相關研究急需克服的重大挑戰。因此，本計畫之主要研究目標首先將整合一系列物理、化學與自組裝模板法製程技術以嘗試直接在不同矽晶基材上製備規則有序排列且尺寸可調變之0 維及1 ;As the device dimensions scale down to nanometer region, the novel processing technologies for the integration of 0-D and 1-D nanomaterials into Si-based nanodevices have attracted much attention in recent years, because large-area well-ordered nanostruct;研究期間：10408~10507
Relation:	財團法人國家實驗研究院科技政策研究與資訊中心
Appears in Collections:	[Department of Chemical and Materials Engineering] Research Project

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