本論文描述一單頻雷射干涉儀，此干涉儀可同時量測待測物的鏡面位移量及傾角，並藉由一嶄新的非線性誤差補償方法，提高其位移量測精準度。 此干涉儀為一九十度相位差偵測系統架構，擁有更為簡易的架構以及更小之體積，不同以往的是只以單一雷射光束量測，達到同時量測位移與傾角的功能。 我們所發展的相位誤差補償方法，能有效消除干涉儀中的非線性特性，與傳統之橢圓擬合之方法相比，新的方法在訊號之相位變化較小及雜訊較大的情況之下，所求得之相位較舊的方法更為精確。 經實驗結果顯示，經過補償運算後，此干涉儀之非線性可以有效修正，可測得位移量測之準確度為0.6奈米。而用來感測待測鏡面之傾斜的四象限二極體的最小可解析之橫向位移量為2微米。This thesis describes a homodyne interferometer that could measure the displacement and tilt of test mirrors. The accuracy of displacement measurement could be enhanced by a novel nonlinearity compensation method. This interferometer adopts quadrature detection system with simpler setup and less system volume. It could measure not only the displacement as usual, but also the tilt motion of target by just a single laser beam. The phase error compensation method developed in the dissertation could correct nonlinearity efficiently. Compare with the conventional ellipse fitting method, the new method could acquire more accurate result than conventional one under less phase variation and noisy conditions. Experiment result demonstrates that after applying compensation, the nonlinearity could be compensated correctly. The precision of displacement measurement could achieve to 0.6nm, and the resolution of quadrant detector used for tilt measurement can reach to 2μm.
