本篇論文主要是架設一Twyman-Green干涉儀，並利用空間光調製器實現相移，完成一套相移干涉量測系統。實驗使用500、550、600、650和700 nm五個波長進行多波長分析，對標準片進行量測，量測高度為442.1 ± 2.7 nm，與標準皆高比較之誤差為1.03%。 多波長系統可以量測反射率光譜和分析反射相位，反射率光譜誤差為2.87%，標準差為0.08%；而反射相位光譜誤差為0.26%，標準差為0.055 rad。 本實驗利用程式消除光源照度不均和元件自我干涉的情形，還原物體表面強度分布，使得分析能夠更精確。利用簡形優化演算法，將反射率光譜和反射相位光譜代入適應函數做評比，得到薄膜折射率和厚度，誤差分別為0.10%和-0.46%。 ;This article aims to set up a phase shifting interferometry(PSI) based on polarized Twyman-Green interferometry and applies spatial light modulator(SLM) as a phase-shifting manner. In research, we made a series of test to obtain relationship between phase shifting and gray level. The PSI system use white light source and narrow band-pass filter to reach multi-wavelength measurement. We detailed the nonuniform illumination caused by white light source and self-interference effect. Then we proposed an improvement with uniform factor to reduce the error and illustrated the difference. The PSI system is capable to measure the reflection amplitude and phase. Simplex algorithm can find the extreme value and help us to make thin film analysis to get material refractive index(n) and thin film thickness(d). The step height error is 1.03%(442.1 ± 2.7 nm). The reflection spectrum error of Ta2O5 thin film is 2.87 %(±0.08 %) and the reflection phase error is 0.26 %(± 0.055 rad). The thin film thickness error is -0.46% and refractive index error is 0.10%.
