無塵室揮發性有機污染物防制對策的探討;A Study of the Prevent Countermeasures of Volatile Organic Compounds in Clean Rooms

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题名:	無塵室揮發性有機污染物防制對策的探討;A Study of the Prevent Countermeasures of Volatile Organic Compounds in Clean Rooms
作者:	陳志鈺;Chen, Zhi-Yu
贡献者:	環境工程研究所
关键词:	事前;危害分析;危害管理;系統分析;揮發性有機氣體;beforehand;hazard analysis;hazard management;system analysis;Volatile Organic Compounds
日期:	2017-07-26
上传时间:	2017-10-27 16:23:31 (UTC+8)
出版者:	國立中央大學
摘要:	隨著世代變化與科技進步，人員於無塵室從事作業機會也相對提升，洩漏或逸散所產生的揮發性有機氣體污染物會造成經濟面、社會面或環境面的衝擊，且若未能採取事前的危害分析與防制對策擬訂，通常異常事件會不斷的發生。事前的危害分析與防制對策擬訂，主要在找出揮發性污染物的可能來源，並對污染來源進行事前的危害預防、事中的緊急應變與事後的補救措施，這樣分析與防制才是正確的做法。因此本研究主要應用系統化的概念與原則，建立具體可行的無塵室揮發污染源分析與防制的方法，包含一開始的無塵室製程與活動界定，分析製程與活動的組成單元，每個組成單元的輸入、輸出、運作程序與作用機制，並對可能產生的揮發性污染原因、可能造成的揮發物污染危害與影響層面進行分析，最後於事前擬訂事前的預防、事中的緊急應變與事後的補救。考量現實面經費有限情況下，亦將探討危害機率與成本提供上位者決策時的參考依據。本研究利用晶圓封裝廠無塵室進行案例研究，應用建立的分析方法與防制對策有效性，結果顯示本研究建立的系統分析方法與防制對策，可有效分析出無塵室的揮發污染源及預防事件的發生，達到危害管理預防或是降低發生的目的。;With global changes and technological advances, opportunities for personnel work in the clean room opportunities also rise. Volatile Organic Compounds (VOCs) leakages and fugitive emissions may cause serious social, economic and environmental impact. Often abnormal event will occur if hazard analysis were not conducted beforehand and pollution control mechanism planned. One should use hazard analysis to find sources of pollutants, and to control thepollutants in elimination of hazards, during-emergency response situations, and postremedial measures. This analysis and control is the most effective approach. This study applies systematic concepts and principles to establish a realistic method in clean room source of pollution analysis and pollution control strategy planning. The first step is to, define the clean room manufacturing processes and activities, analyze component and structure in the processes. The structure analysis includes input, output, operational procedures, and activation mechanism. The next step is to analyzethe possible causes of VOCs pollution, potential consequences and impact. The final step is to design the pollution source control mechanism. planning control sources of pollution in pre- hazard prevention, during- emergency response, and after- remedial measure. Consider the actual cost is limited, provide hazard probability and cost information for company manager to decision. In this study, the Wafer Level Chip Scale Packaging is the target process. Effectiveness of the proposed hazard analysis and control planning methodology is verified. The results show that pollution source analysis and hazard management approach adopted in this study can effectively analyze clean room VOCs pollution and prevent the occurrence of hazardous events and accidents.
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