含鋁氮化鎵有機化學反應腔體之物種傳輸與濃度沉積分布之數值模擬研究 ;Numerical Simulation of Mocvd Reactor of Algan Chemical Specices Transport and Composition Distribution

NCUIR > Engineering College > Departmant of Mechanical Engineering > Research Project > Item 987654321/76344

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/76344

Title:	含鋁氮化鎵有機化學反應腔體之物種傳輸與濃度沉積分布之數值模擬研究;Numerical Simulation of Mocvd Reactor of Algan Chemical Specices Transport and Composition Distribution
Authors:	陳志臣
Contributors:	國立中央大學機械工程學系
Keywords:	機械工程
Date:	2018-08-01
Issue Date:	2018-05-02 17:55:20 (UTC+8)
Publisher:	科技部
Abstract:	研究期間：10708 ~ 10807
Relation:	財團法人國家實驗研究院科技政策研究與資訊中心
Appears in Collections:	[Departmant of Mechanical Engineering ] Research Project

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