石英諧振器之電極面設計對振盪頻率擾動之溫度相依性研究

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题名:	石英諧振器之電極面設計對振盪頻率擾動之溫度相依性研究
作者:	葉朕旗;Yeh, Chen-Chi
贡献者:	通訊工程學系在職專班
关键词:	石英諧振器;頻率擾動;溫度效應;quartz resonator;frequency disturbance;temperature effect
日期:	2018-07-16
上传时间:	2018-08-31 14:37:13 (UTC+8)
出版者:	國立中央大學
摘要:	石英元件的三項重要參數為頻率、精確度和尺寸大小，其中頻率穩定性為最基本的關鍵特性，常作為電子通訊設備工作穩定度的核心。電極為影響頻率的重要條件，除此之外，石英諧振器在溫度變化下需具有高穩定度，因此本研究以石英諧振器電極尺寸變化探討在特定溫度範圍內對電性及性能的影響。石英諧振器製程利用遮罩濺鍍電極膜對稱於石英晶片兩側，再以導電膠將晶片與陶瓷基板黏合和導通，並將金屬蓋板和陶瓷基座焊封。實驗條件基準利用有限元素分析方法計算，以電極尺寸X 、Z 方向為測試條件變數進行實驗。利用溫度測試系統量測諧振器對溫度效應的特性，並進行頻率穩定性的分析。結果顯示，在溫測頻率曲線方面，電極尺寸Z、X 方向變化並未有明顯影響。在溫測電阻值和擾動方面，有異常的電阻值和擾動在高溫區域產生，電極Z 方向縮短比X 方向縮短的電阻值和擾動溫域變化來得劇烈，且電極尺寸Z 方向縮短達0.63 mm 時電阻值和擾動正常，電極尺寸Z 方向縮短為0.59 mm 時，則電阻值和擾動異常的溫度區域會在低溫發生。研究結果顯示，調整電極尺寸可以有效改變頻率擾動之發生溫度，適當的調整電極尺寸將可避免工作溫度範圍中異常擾動訊號產生。;The three important parameters of quartz components are frequency, accuracy, and dimensions. Frequency stability is the most basic key characteristic and is usually the core of the operational stability of electronic communication equipment. The electrode is an important factor that affectsing the frequency. In addition, the quartz resonator needs to have high stability under temperature change. Therefore, this study investigates the effects of electrode size on the electrical properties of the quartz resonator in a specific temperature range. The quartz resonator manufacture process uses sputtering to deposit the electrode film symmetrically on both sides of the quartz chip though a mask. Then, adheres the quartz chip to the ceramic substrate with a conductive paste. Finally, seals the metal cover and the ceramic base. The standard conditions of the experiments were calculated by the finite element analysis method and the electrode size in the X and Z directions were chosen as the main test variables. The experiments were carried out using the temperature test system to measure the characteristics of the resonator under temperature change and analyze its frequency stability. The results show that in the temperature dependent frequency curve, the changes in the Z and X directions of the electrode have no significant difference. In the resistance and frequency disturbance measurements, abnormal resistance values and frequency disturbances occur in the high temperature regions, and become more significant in the Z direction shortening than in the X direction shortening cases. The resistance value and frequency disturbance fitting error are normal when the electrode size is shortened by 0.63 mm in the Z direction, and are abnormal at a low temperature when the electrode is shortened to 0.59 mm in the Z direction. The results show that adjusting the electrode size can effectively change the temperature at which of the frequency disturbance occurs. Appropriate adjustment of the electrode size will avoid the occurrence of abnormal frequency signals in the operating temperature range.
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