本計畫預定完成下列工作目標:以電化學積層製造技術來析鍍具有磁性功能之合金微柱，進而製作奈米合金探針。技術上，將採用本研究室開發建立之微陽極導引電鍍製程，結合彎液定域奈米電鍍法，在合金鍍液中析鍍出具有奈米晶之合金探針，以供磁力顯微鏡之使用；學術上，則在研究微電鍍析鍍合金奈米晶之探針可行性，並探討此探針之微結構、磁性質與實驗參數之影響。研究方法，則以局部微電鍍技術，在鈷基合金鍍液中，製作高硬度、高強度之含鉬、鎢奈米晶磁性探針，預期一方面改善當前商用矽/氮化矽表層披覆鈷鉻合金膜探針之磁性與影像解析力不佳之問題；另一方面，開發製作鎳-鐵及鐵-硼合金組成之軟磁探針。本計畫除開發合金磁性探針製作技術外，在學理上，將探討合金組成、晶體組織與微結構受微電鍍實驗參數(鍍浴組成、偏壓、電極間距)之影響，進而討論製程中電場強度對探針的磁性-如導磁率( μ )、矯頑磁力（Hc）、飽和磁通量(Ms)等之效應，以提升探針之磁性靈敏度及影像信噪比。 ;The target of this proposal is aimed at technological development on the additive manufacturing by means of micro-electrochemical process to fabricate metallic alloying probes with the magnetic function used in magnetic force microscopy (MFM). In this work, the micro-anode guided electrochemical process (MAGE) established in our laboratory is combined with meniscus-confined electrodeposition (MCE) to perform electrodeposition in the alloying bath to prepare the alloying probes. The composition, crystal structure, mechanical property and magnetic property of the probes will be studied to comprehend their relationship with the experimental parameters (e.g., electric bias, inter-electrode gap, bath composition, and temperature) in the electrochemical process. In addition, the correlation between the magnetic property and the composition, crystallinity, and microstructure of the alloying probes is also explored.
