本研究係以具超硬脆特性之鐵基金屬玻璃作為實驗用材質，並針對板狀試片進行超音波輔助液中磨削加工特性之研究。本研究所設定之實驗控制因子為超音波振幅、刀具進給速度、切削深度以及主軸轉速，探討各控制因子與表面粗糙度之關係，並在加工實驗後針對被加工後材料以XRD進行檢測，以探討試片加工後有無產生結晶現象。依據單因子實驗結果所顯示，參數組合超音波振幅段數6、刀具進給速度50mm/min、切削深度0.01 mm以及主軸轉速8000 rpm，可得到最佳表面粗糙度Ra 0.017 μm，應用超音波輔助磨削機制能改善鐵基金屬玻璃之表面品質，且試片經過超音波磨削加工後，仍為非晶狀態之金屬玻璃，實驗證實超音波磨削加工可應用於鐵基金屬玻璃加工。;This research is conducted by using Ultrasonic Assisted Grinding (UAG) under cutting fluid. Fe-based metallic glass plate is used as experimental workpiece. The experimental control parameters in this research are ultrasonic power (level), tool feed rate, cutting depth and spindle speed. The relationship between each control parameter and surface roughness were investigated. XRD was used to detect whether the workpiece was amorphous after the UAG processing. According to the results, the best surface roughness Ra 0.017 μm can be obtained under control parameter combination with ultrasonic power level 6, feed speed 50 mm/min, cutting depth 0.01 mm and spindle speed 8000 rpm. The results show that the ultrasonic assisted grinding under cutting fluid cooling mechanism can improve the surface quality of the Fe-based metallic glass plate. Fe-based metallic glass plates are still amorphous materials after the UAG processing. Based on the results of this experiment, it was concluded that UAG process can be applied to the Fe-based metallic glass plate machining.
