氮化銦鎵表面增強拉曼散射的製程優化;Process optimization of InGaN-based surface-enhanced Raman scattering

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题名:	氮化銦鎵表面增強拉曼散射的製程優化;Process optimization of InGaN-based surface-enhanced Raman scattering
作者:	胡道睿;Hu, Tao-Jui
贡献者:	光電科學與工程學系
关键词:	拉曼散射;Raman scattering
日期:	2020-07-24
上传时间:	2020-09-02 15:38:07 (UTC+8)
出版者:	國立中央大學
摘要:	表面增強拉曼散射(surface enhanced Raman scattering, SERS)可大幅提升分子的拉曼散射訊號，已逐漸成為分子診斷的有效工具。在本研究中，我們以鍍金(Au)奈米顆粒的氮化銦鎵(InGaN)微米量子井，作為新型的SERS基板，並以此檢測單股去氧核醣核酸(single-stranded deoxyribonucleic acid, ssDNA)及葡萄糖(glucose)。透過製程上的優化，包括金屬厚度、包覆層厚度、氫氣的蝕刻、退火溫度，來增強分子的SERS訊號。這些製程條件的優化，是為了提升基板表面的局部表面電漿共振(localized surface plasmon resonance, LSPR)和電荷轉移共振(charge transfer resonance, CTR)的強度。我們發現以厚度50nm的金、300℃的退火溫度來製作金奈米顆粒，可以得到最佳檢測效果，以此條件製程的InGaN SERS基板，可檢測濃度低至10-4 M的ssDNA和1 g/L的glucose。;Surface enhanced Raman scattering (SERS) can greatly enhance the Raman scattering signal of molecules, and has gradually become an effective tool for molecular diagnosis. In this study, we used indium gallium nitride (InGaN) quantum wells covered with gold (Au) nanoparticles as a new SERS substrate, and used this to detect single-stranded deoxyribonucleic acid (ssDNA) and glucose. Through optimization of the process, including metal thickness and annealing temperature, we aim to enhance SERS signal of the molecular. The optimization is to promote localized surface plasmon resonance (LSPR) and charge transfer resonance (CTR) on the SERS substrate. We found that the nanoparticles fabricated with 50 nm-thick gold and 300 ℃ annealing temperature produced the highest sensitivity. With these conditions, we were able to detect ssDNA and glucose with the concentrations down to 10-4 M and 1 g/L, respectively.
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