新型循環掃描式高均勻LED平行曝光機的光學設計與驗證研究;Optical Design and Verification of a New Circular Scanning High-Uniformity Led Collimated Exposure Unit

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题名:	新型循環掃描式高均勻LED平行曝光機的光學設計與驗證研究;Optical Design and Verification of a New Circular Scanning High-Uniformity Led Collimated Exposure Unit
作者:	陳奇夆
贡献者:	機械工程學系
关键词:	掃描式曝光機;紫外光發光二極體;多光源照度分佈演算法;Scanning exposure machine;Ultraviolet light emitting diode(UV-LED);multiple irradiance distribution algorithm
日期:	2020-12-08
上传时间:	2020-12-09 11:02:14 (UTC+8)
出版者:	科技部
摘要:	本計畫的目標為開發一種掃描式LED平行曝光機，利用光場分佈演算技術，建構掃描式LED平行曝光機模型，考量工業4.0下配合綠色能源的議題，使用UV-LED取代傳統氙氣燈，並建立預補償系統，達到生產線最佳化自動調整的能力。本計畫的主要目的為建立掃描式LED平行曝光機的模型，設計半角3度與半角4度的的LED單光源模組，再配合光源相關的機構設計分析誤差，並考慮LED的光衰變現象，建立預先補償機制，進行22×25曝光機光學模組的設計與分析，最終進行簡易循環掃描式曝光機的試製與驗證，以期許能夠使的掃描式LED平行曝光源裝置擁有高程度的光學品質。 ;The goal of this project is to develop a scanning LED of parallel exposure machine, using light field distribution calculation technology to construct a scanning LED of parallel exposure machine model. Considering the topic of supporting green energy under Industry 4.0, we use UV-LED to replace the traditional xenon lamps. Set up a pre-compensation system to reach the ability of production line optimization and automatic adjustment. The main purpose of this project is to build a model of a scanning LED of parallel exposure machine and design a LED single-light source modules with a half-angle of 3 degrees and a half-angle of 4 degrees. Then analyze the errors related to the design of the light-source-related mechanisms, and consider the light decay phenomenon of LEDs. Set up a pre-compensation mechanism, analyze the module of the 22 × 25 exposure machine. Finally, trail production of simple cycle scanning exposure machine. It is expected that the scanning LED parallel exposure source device can have a high degree of optical quality.
關聯:	財團法人國家實驗研究院科技政策研究與資訊中心
显示于类别:	[機械工程學系] 研究計畫

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