| 摘要: | 高精度的測長及定位是精密工程發展的關鍵要素，由於雷射干涉儀可於長行程的測量範圍同時保有高解析度之特性，因此廣泛地應用於機台線性軸的校正及微機電設備的定位。
然而，傳統干涉儀的量測穩定度易受環境擾動所影響，如欲實現高精度的量測性能，勢必需加強周遭環境條件的控制，故發展一高穩定且適用性高的干涉儀為一重要課題，根據以往的研究成果，共光程的Fabry-P?rot干涉結構具有較佳的抗環境擾動能力。因此，本文基於此一光路架構進行光機的設計與訊號處理的開發，以研製出兩種類型的Fabry-P?rot干涉位移量測模組，可滿足高精度的檢測需求及提升量測的準確度。
而根據技術的演進與產業的應用回顧，多自由度的幾何誤差檢測是可預期的發展趨勢，故本文以多功能檢測與模組化整合為開發導向，亦研製出直線度、俯仰與偏擺角度的光電檢測模組，可依據使用者的需求使用單一模組或整合多模組以進行應用，達到單軸多參數的檢測目的，此外，為提升量測的準確度與調校的便利性，本文亦提出光軸自動準直模組，改善檢測的效率。
隨著各項誤差檢測與自動準直模組的開發，已實現的量測性能如下:於長行程實驗測試，偏光式Fabry-P?rot位移量測模組的重複精度優於0.171 μm；偏光差動式Fabry-P?rot位移量測模組的重複精度優於0.120 μm。直線度量測模組的驗證結果顯示，其重複精度小於0.279 μm；角度量測模組的驗證結果顯示，測量的重複精度小於0.24 arcsec；經實驗結果評估，光軸自動準直模組可將餘弦誤差縮減至1 nm內；五自由度同時量測的結果顯示，差動式Fabry-P?rot干涉儀的位移重複精度為0.106 μm，水平與垂直直線度的重複精度小於0.252 μm，俯仰與偏擺角度的重複精度小於0.22 arcsec。
從上述測試結果顯示，透過精簡的光機設計，各模組皆可便利使用與靈活整合，無需複雜的光機調校，即可實現高效率與高精度的檢測。;High-precision length measurement and positioning are the essential key points for the development of precision engineering. Because laser interferometers possess the measuring characteristics of large measuring range and high resolution simultaneously, they are widely employed in the calibration of the linear axis in the machine tool and the micro-electromechanical device′s positioning.
However, the measurement stability of conventional interferometers is susceptible to environmental disturbances. To achieve high-precision measurement performance, it is necessary to strengthen the control of the surrounding environment′s conditions. For this reason, the development of an interferometer with high stability and applicability is a critical issue. According to the previous study, the interferometer with the common path structure is insensitive to environmental disturbances. Therefore, this study based on this optical structure implements the optomechanical design and the construction of the signal processing to develop two types of Fabry-P?rot interferometric displacement measurement modules, which can meet the inspection requirements with high precision and can enhance the measurement accuracy.
Additionally, according to the technological development and the review of industrial applications, the inspection of multi-degree-of-freedom geometric errors is the expectable trend of industrial development. Therefore, this study orientates itself in the development of multifunctional inspection and modular integration, and the corresponding photoelectric inspection modules are constructed to measure the straightness, pitch, and yaw angle. Each module can be utilized individually or integrated collectively according to the user’s demands to achieve the inspection purpose of axial multi-degree-of-freedom geometric errors. Furthermore, to improve the measurement accuracy and the alignment convenience, the automatic optical alignment module proposed in this study can also be integrated into other measurement modules to enhance the inspection efficiency.
With this development of optical alignment and various inspection modules, the measurement performances can be realized in the following descriptions. The correlated measurement repeatability of the polarized Fabry-P?rot interferometer and the polarized differential Fabry-P?rot interferometer proposed in this study is less than 0.171 μm and 0.120 μm, respectively, during the large measuring range. The verification result of the straightness measurement module indicates that the repeatability is less than 0.279 μm. The verification result of the measurement module of the pitch and yaw angle indicates that the measurement repeatability is less than 0.24 arcsec. And by the evaluation of the experimental result for the optical alignment module, the cosine error can be reduced to less than 1 nm after the alignment procedure. The simultaneous measurement results of the five-degree-of-freedom laser interferometer system demonstrate that the repeatability of the linear displacement, straightness, and the tilt angle is less than 0.106 μm, 0.252 μm, and 0.22 arcsec, respectively.
The above testing results reveal that each module can be easily used and flexibly integrated through the streamlined optomechanical design. High-efficiency and high-precision inspection can be achieved without complicated optomechanical alignment. |
