本文提出了一種陰影疊紋瞬時分析(instantaneous analysis technique for shadow moir? method)技術，以量測動態面外之位移(dynamic out-of-plane displacement) ，並用於開發新型光學干涉型觸覺感測或壓力感測器。陰影疊紋法廣泛應用於量測移動面外之位移，例如物體表面的變形或翹曲。通常，使用移相方法(phase-shifting method, PSM)分析陰影疊紋圖的相位而獲得移動面外之位移。然而此方法必須精確的移動光柵才能產生精確移相，而求出位移。傳統上使用線性位移平台(linear translation stages)提供光柵的移動，而線性位移平台具有位移誤差及移動速度慢等缺點。因此，本文提出一種混合時間域與空間域的移相方法，設計一組含4個步高(step-height)的新型階梯結構板，以產生具有正交相位的陰影疊紋，並用於瞬時提取陰影疊紋相位，以測量物體的動態面外之位移。既可以不用線性位移平台，又可快速取得陰影疊紋相位。實驗證明，此方法可以有效地檢測出動態面外之位移，且具有微米級的分辨率，並且能夠將位移誤差抑制到0.83％。本文所提出的一種陰影疊紋瞬時分析測量方法適合於觸覺感測器開發或壓力感測的應用。;This thesis presents an instantaneous analysis technique for shadow moir? method for dynamic out-of-plane displacement measurement. The proposed method can be used to develop a new type of optical interference tactile sensor or pressure sensor. The shadow moir? method is widely applied to the measurement of the out-of-plane displacement, such as the deformation or warpage on the surface of the objects. Generally, the phase-shifting method is used to analyze the phases of the shadow moir? fringes and to obtain the out-of-plane displacement. To generate accurate phase shifting, the grating must be moved step by step precisely. Traditionally, the movement of the grating is realized by a linear translation stage. However, such a mechanical stage generates displacement error, and its moving speed is slow. Therefore, a novel stair-structured plate consisting of a series of 4-step-height sets is designed to produce shadow moir? fringes with the quadrature phase. The quadrature-phase fringes are utilized to extract instantaneously the shadow moir? phase for measurement of the dynamic out-of-plane displacement of an object. Experiments show that our method can effectively detect the dynamic out-of-plane displacement with a micrometric scale resolution and is capable of suppressing the discrepancy of displacement to 0.83 %. The proposed method for measuring the out-of-plane displacement is suitable for the application to the tactile sensor and pressure sensing.
