機械手臂在高速波前量測的應用;Application of mechanical arm in high-speed wavefront measurement

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题名:	機械手臂在高速波前量測的應用;Application of mechanical arm in high-speed wavefront measurement
作者:	陳愷威;Chen, Kai-Wei
贡献者:	光電科學與工程學系
关键词:	機械手臂;波前量測;高動態範圍波前檢測器;Mechanical Arm;Wavefront Measurement;HDR Shack Hartmann WFS
日期:	2022-09-27
上传时间:	2022-10-04 11:16:18 (UTC+8)
出版者:	國立中央大學
摘要:	現今對於小型鏡片的需求越來越多且越來越廣，但對於檢測小型鏡片之偏心的設備卻無一能做到高速且準確地量測。本實驗室先前開發出一種能夠高速且高通量的自動化波前檢測設備儀器來解決需要大量檢測小型鏡片之偏心的需求。相較於市面上的產品，該儀器可以在10秒內檢測完一顆鏡片，而且有的偏心量測重複性。因為該儀器是非接觸式量測，檢測完的鏡片可以實裝在光學元件上直接使用，滿足製造方需大量且快速檢測並且現量現用的需求。但對應到此儀器設備高速且高精度的檢測，如何將鏡片快速且穩定地放置在量測位置上，除了取放設備本身的速度與精度必須要達到檢測要求，定位座標的部分也成了很重要的前置作業。本實驗針對量測設備上鏡片定位的部分，有別於以往用肉眼費時且精度低的定位，我們改採用高精度的探頭來讓負責取放鏡片的機械手臂有精確並且可自動定位的座標，並且透過此定位方式也確實改善鏡片偶爾會放置在錯的位置的情況，來達到我們高速且高精度的量測標準。 ;Today, the demand for small lenses continues to increase and expand, but no small lens eccentricity detection equipment can achieve high-speed and accurate measurement. A large number of automated wavefront detection equipment and instruments are required to solve a large number of detection requirements for small lens eccentricity. The instrument can detect a lens in 10 seconds, and measurement repeatability about 0.02-0.05 um, because of the non-contact measurement, the detected lens can be directly installed on the optical element, meeting the needs of a large number of rapid inspections. However, in order to cope with the high-speed and high-precision detection of this kind of equipment, in addition to the speed and accuracy of the pick-and-place equipment itself, which must meet the detection requirements, the positioning coordinates also become very important upfront work. Different from the time-consuming and low-precision positioning of the naked eye in the past, we switched to a high-precision probe, so that the robotic arm responsible for picking and placing the lens has accurate and automated positioning coordinates. This positioning method does improve the occasional placement of the lens in the wrong place.
显示于类别:	[光電科學研究所] 博碩士論文

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