全氧化鋅熱電材料開發及元件製作;Development of Zinc Oxide Thermoelectric Materials and Device Fabrication

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题名:	全氧化鋅熱電材料開發及元件製作;Development of Zinc Oxide Thermoelectric Materials and Device Fabrication
作者:	林育賢;Lin, Yu-Hsien
贡献者:	電機工程學系
关键词:	熱電;熱電材料;熱電元件;氧化鋅
日期:	2022-07-28
上传时间:	2022-10-04 12:03:36 (UTC+8)
出版者:	國立中央大學
摘要:	世界各地愈來愈重視全球暖化與溫室效應，而紛紛在探索對環境友善且環保的替代能源。熱電材料則是一個不錯的替代選項，它是一種能在熱能以及電能之間轉換的材料，利用溫度差來產生電能以提高能源使用的效率，因此可以應用於像是汽車的廢熱回收、太空科技或者穿戴式裝置上。而不同材料有著不同的熱電特性，氧化物半導體因為其良好的化學穩定性、熱穩定性、無毒及低成本而成為一種很有前途的熱電材料。本論文研究氧化鋅材料，經由摻雜不同比例的磷，使其成為P-type材料。我們發現以0.192 at%比例的磷摻雜至氧化鋅中，具有最佳之熱電特性。選擇最佳的摻雜比例及退火參數後，進行後續接觸金屬及電極的測試。最後使其與N-type氧化鋅建構成熱電元件，並在不同溫度下量測其輸出功率。;The world has been paying attention to global warming and the greenhouse effect in these days, and the renewable energy sources have been explored. Thermoelectric material is a good alternative option for energy source. It is a material that can convert thermal energy into electrical energy. It requires temperature difference to generate electrical energy. For example, it can be applied to automobiles, space technology or wearable devices. Different materials have different thermoelectric performance. Oxide semiconductors have become a promising thermoelectric material because of their good chemical stability, thermal stability, non-toxicity and abundance in earth, despite their low ZT. Zinc Oxide material is studied in this work, and it becomes a P-type material by doping phosphorus. We found that 0.192 at% phosphorus doping into Zinc Oxide demonstrates the best thermoelectric properties. By the optimal doping concentration and annealing conditions, metal contact and electrode were tested. Finally, a device by a n-type and a p-type zinc oxide was made, and its output power was measured at different temperatures.
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