雙波長偏振干涉儀之研發與精密量測之應用;Development and Precision Measurement Applications of Dual-Wavelength Polarization Interferometer

NCUIR > Engineering College > Departmant of Mechanical Engineering > Research Project > Item 987654321/94365

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/94365

Title:	雙波長偏振干涉儀之研發與精密量測之應用;Development and Precision Measurement Applications of Dual-Wavelength Polarization Interferometer
Authors:	李朱育
Contributors:	國立中央大學機械工程學系
Keywords:	偏振干涉儀;雙波長技術;波長可調光源;形貌量測;粗糙表面;Polarization Interference;Dual-Wavelength Technique;Wavelength- Tunable Source;Surface Profile Measurement;Rough Surface
Date:	2024-09-27
Issue Date:	2024-09-30 18:01:08 (UTC+8)
Publisher:	國家科學及技術委員會(本會)
Abstract:	本計畫所開發的雙波長與連續波長調制偏振干涉量測技術，突破傳統干涉儀僅能量測光滑表面形貌的限制，適用於各種物體表面形貌的量測，且具有高精度的優勢。半導體及相關精密製程產業中所需的材料或元件品質檢測，均可透過本計畫開發之量測技術進行檢測，將可有效提升相關精密製程之良率，增加台灣產業競爭力。
Relation:	財團法人國家實驗研究院科技政策研究與資訊中心
Appears in Collections:	[Departmant of Mechanical Engineering ] Research Project

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