在這項研究中，提出了紅外斜向入射濾光膜的結構設計，目的是為了提高紅外光學器件的性能和應用範圍。這種獨特的結構是由氫化矽鋁層和低折射率層交替堆疊。 這種設計的濾光膜在特定的波長範圍內形成了多角度的通帶。當入射角度從0°至30°發生變化時，中心波長的偏移量小於10nm，這對於維持系統的穩定性和性能一致性非常有利。 在紅外帶通濾波結構的反面形成了長波通濾光膜，這有助於提高光學傳輸的效率。這項研究的成果將對紅外光學器件的設計和應用產生深遠的影響。 這項研究不僅提出了濾光膜的結構設計，還對紅外光學器件的性能和應用範圍進行了提升，並為相關領域的學者和工程師提供有價值的參考，推動紅外光學技術的發展和應用。 ;In this study, a structural design of infrared oblique incidence filter films was proposed to enhance the performance and application range of infrared optical devices. This unique structure consists of alternating layers of hydrogenated silicon aluminum and low refractive index layers. The design of this filter film forms a multi-angle passband within a specific wavelength range. When the incident angle varies from 0° to 30°, the offset of the central wavelength is less than 10nm, which is beneficial for maintaining system stability and performance consistency. On the reverse side of the infrared bandpass filter structure, a long-wave transmission filter film was formed, contributing to the improvement of optical transmission efficiency. The outcomes of this study will have a profound impact on the design and application of infrared optical devices. This research not only proposes the structural design of filter films but also providing valuable references for scholars and engineers in related fields, thus driving the development and application of infrared optical technology.
