| 摘要(英) |
Semiconductor industry is a very competitive industry. The make-to-order semiconductor fab in order to satisfy customer’s delivery date, it is very important performance measure in a make-to-order fab. GaAs fab production mode is very similar to the silicon fab, but because of the high complexity of the products and technologies and is does not achieve economies of scale of production. The application of automation to semiconductor equipment is low and production recipe control sensitivity is high, it causes poor production efficiency and stability. To improve the production control of the large semiconductor fab, there are many related exploration and research. For semiconductor production lines of different modules and characteristics, they can’t be directly applied to the relevant research results.
The research purpose is to improve equipment utilization rate and meet customer delivery targets
Establish a factory production efficiency for different size and characteristics of the semiconductor and management improvement model to improve equipment utilization rate and meet customer delivery targets. |
| 參考文獻 |
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