Amorphous Si/Au wafer bonding

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Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/29797

Title:	Amorphous Si/Au wafer bonding
Authors:	Chen,P. H.;Lin,C. L.;Liu,C. Y.
Contributors:	材料科學與工程研究所
Keywords:	TEMPERATURE;GOLD
Date:	2007
Issue Date:	2010-07-06 15:58:17 (UTC+8)
Publisher:	中央大學
Abstract:	The authors report a rapid reaction between Au and amorphous Si (a-Si), which occurred at a much faster rate compared to the case of crystal Si/Au reaction. With an amorphous Si coating layer on crystal Si (c-Si) wafer, air voids and craters were prevente
Relation:	APPLIED PHYSICS LETTERS
Appears in Collections:	[Institute of Materials Science and Engineering] journal & Dissertation

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