Improved microwave performance of spiral inductors on Si substrates by chemically anodizing a porous silicon layer

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Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/32660

Title:	Improved microwave performance of spiral inductors on Si substrates by chemically anodizing a porous silicon layer
Authors:	Yu,MJ;Chan,YJ;Laih,LH;Hong,JW
Contributors:	電機工程研究所
Date:	2000
Issue Date:	2010-07-06 18:35:43 (UTC+8)
Publisher:	中央大學
Abstract:	Spiral inductors have been evaluated on Si substrates by inserting a porous Si layer for the application of MMICs. This high-resistive porous Si layer provides a low substrate loss and a low coupling effect. Spiral inductors fabricated on this layer achie
Relation:	MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
Appears in Collections:	[Graduate Institute of Electrical Engineering] journal & Dissertation

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